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1.
Heliyon ; 10(7): e28009, 2024 Apr 15.
Artículo en Inglés | MEDLINE | ID: mdl-38560131

RESUMEN

The Global South comprising economically disadvantaged regions of the world face various challenges such as limited access to electricity, clean water, industrialization, and food security. Solar energy, as a sustainable and abundant resource, holds great potential to address these challenges. Despite its immense potential, the Global South encounters hurdles related to technology adoption, infrastructure, and financial constraints. This review examines the history, classifications, global statistics, merits, and demerits of solar technology in the Global South. Furthermore, it delves into various applications of solar energy, including extreme environments, residential electricity generation, transportation, and industrial usage in this region. This study concludes by providing new insighths and highlighting the significant role solar energy can play in shaping the future of the Global South if challenges are adequately addressed, and opportunities are embraced.

2.
Chem Rev ; 124(8): 5119-5166, 2024 Apr 24.
Artículo en Inglés | MEDLINE | ID: mdl-38619540

RESUMEN

Highly efficient coelectrolysis of CO2/H2O into syngas (a mixture of CO/H2), and subsequent syngas conversion to fuels and value-added chemicals, is one of the most promising alternatives to reach the corner of zero carbon strategy and renewable electricity storage. This research reviews the current state-of-the-art advancements in the coelectrolysis of CO2/H2O in solid oxide electrolyzer cells (SOECs) to produce the important syngas intermediate. The overviews of the latest research on the operating principles and thermodynamic and kinetic models are included for both oxygen-ion- and proton-conducting SOECs. The advanced materials that have recently been developed for both types of SOECs are summarized. It later elucidates the necessity and possibility of regulating the syngas ratios (H2:CO) via changing the operating conditions, including temperature, inlet gas composition, flow rate, applied voltage or current, and pressure. In addition, the sustainability and widespread application of SOEC technology for the conversion of syngas is highlighted. Finally, the challenges and the future research directions in this field are addressed. This review will appeal to scientists working on renewable-energy-conversion technologies, CO2 utilization, and SOEC applications. The implementation of the technologies introduced in this review offers solutions to climate change and renewable-power-storage problems.

3.
J Mol Graph Model ; 120: 108423, 2023 05.
Artículo en Inglés | MEDLINE | ID: mdl-36731208

RESUMEN

By developing next-generation lithium-ion batteries (LIBS), demand for exploring novel anode materials with exclusive electrochemical features and ultra-high capacity is increasing. In the current research, first-principles theory, and density functional theory (DFT) calculations were conducted to extensively investigate and compare the capability of three different borophene nanolayers, including striped, ß12, and χ3 borophene, as a novel candidate for anode electrode in LIBs. We first predicted the most preferential Li atom adsorption sites on the three borophene structures. The predicted average formation energies for striped, ß12, and χ3 borophene were obtained 3.123, 3.184, and 3.216 eV, respectively. The positive value of formation energy exhibits the sufficient stability of the structures. Moreover, the negative adsorption energy proved that Li atom insertion on all borophene monolayers is thermodynamically favorable. In order to simulate the lithiation process, we gradually increased the concentration of Li atoms. We found that the fully lithiated striped, ß12 and χ3 borophenes could provide ultra-high specific capacities of 1700, 1983, and 1859 mAh/g, respectively. Structural analysis proved that the surface area expansion rate of the striped borophene in a fully lithiated state was 1%, which was lower than those of ß12 and χ3 borophene with 3.33% and 2.63%, respectively. The analyses of electronic properties confirmed that borophenes were inherently metallic and superior ion conductive agents, even after fully lithiated state. Ion diffusion was studied using Nudged elastic band method and the value of diffusion energy barrier ranged from 0.03 to 0.36 eV which was lower than other promising 2D anode materials. Furthermore, open-circuit voltage results demonstrated that the electronic potential of modeled borophenes was low enough to be in the acceptable range of under 1.2V. All these reports exhibited that borophene nanolayers with excellent specific capacity and superior conductivity were desired candidates for anode materials of next generation LIBs.


Asunto(s)
Litio , Adsorción , Difusión , Conductividad Eléctrica , Electrodos , Iones
4.
Mater Renew Sustain Energy ; 11(2): 143-153, 2022.
Artículo en Inglés | MEDLINE | ID: mdl-35892085

RESUMEN

Pollution-induced environmental deterioration is one of the serious aspects that must be solved. As a result, biodiesel was made from a novel material (Parsley seed oil) through an alkali-induced transesterification reaction. The efficiency, as well as exhaust emission tests, were performed by running the prepared parsley biodiesel blends (mixture of biodiesel and diesel fuel in different proportions) in an engine. The ideal blend for enhancing engine performance was discovered to be B20, which displayed steady performance attributes without requiring any modifications to the diesel engine. The B20 parsley biodiesel blend had fewer emissions than diesel, notably hydrocarbons, and carbon monoxide except for nitrogen oxides and carbon dioxide. B20 Parsley blends were also shown to emit less pollution than other blends (B5 and B10). A high reduction in CO, CO2 and HC emissions for B20 was recorded at 33.9%, 29.73%, and 11.38% relative to diesel except for NO x . Brake-specific energy consumption decreases and thermal efficiency of the engine increases for all biodiesel blends. In addition, from the performance results, BTE and BSFC of B20 are relatively close to those of pure diesel fuel (B0). The use of parsley biodiesel as a diesel engine fuel was shown to be a promising strategy to promote the use of green fuels (biofuels from renewable materials) while simultaneously mitigating the release of toxic greenhouse gases from the combustion of fossil fuel.

5.
Environ Technol ; 43(11): 1634-1647, 2022 Apr.
Artículo en Inglés | MEDLINE | ID: mdl-33143558

RESUMEN

The present waste-management system in most developing countries are insufficient to combat the challenge of increasing rate of solid waste generation. Accurate prediction of waste generated through modelling approach will help to overcome the challenge of deficient-planning of sustainable waste-management. In modelling the complexity within a system, a paradigm-shift from classical-model to artificial intelligent model has been necessitated. Previous researches which used Adaptive Neuro-Fuzzy Inference System (ANFIS) for waste generation forecast did not investigate the effect of clustering-techniques and parameters on the performance of the model despite its significance in achieving accurate prediction. This study therefore investigates the impact of the parameters of three clustering-technique namely: Fuzzy c-means (FCM), Grid-Partitioning (GP) and Subtractive-Clustering (SC) on the performance of the ANFIS model in predicting waste generation using South Africa as a case study. Socio-economic and demographic provincial-data for the period 2008-2016 were used as input-variables and provincial waste quantities as output-variable. ANFIS model clustered with GP using triangular input membership-function (tri-MF) and a linear type output membership-function (ANFIS-GP1) is the optimal model with Mean Absolute Percentage Error (MAPE), Mean Absolute Deviation (MAD), Root Mean Square Error (RMSE) and Correlation Co-efficient (R2) values of 12.6727, 0.6940, 1.2372 and 0.9392 respectively. Based on the result in this study, ANFIS-GP with a triangular membership-function is recommended for modelling waste generation. The tool presented in this study can be utilized for the national repository of waste generation data by the South Africa Waste Information Centre (SAWIC) in South Africa and in other developing countries.


Asunto(s)
Residuos Sólidos , Administración de Residuos , Análisis por Conglomerados , Lógica Difusa , Redes Neurales de la Computación , Residuos Sólidos/análisis , Administración de Residuos/métodos
6.
Environ Sci Pollut Res Int ; 29(5): 7366-7381, 2022 Jan.
Artículo en Inglés | MEDLINE | ID: mdl-34476692

RESUMEN

Proper information regarding the performance of waste management systems from an environmental perspective is significant to sustainable waste management decisions and planning toward the selection of the least impactful treatment options. However, little is known about the environmental impacts of the different waste management options in South Africa. This study is therefore aimed at using the life cycle assessment tool to assess the environmental impact of the current, emerging, and alternative waste management systems in South Africa, using the city of Johannesburg as a case study. This assessment involves a comparative analysis of the unit processes of waste management and the different waste management scenarios comprising two or more unit processes from an environmental view. The lifecycle boundary consists of unit processes: waste collection and transportation (WC&T), material recycling facilities (MRF), composting, incineration, and landfilling. Four scenarios developed for the assessment are S1 (WC&T, MRF, and landfilling without energy recovery), S2 (WC&T, MRF, composting, and landfilling with energy recovery), S3 (WC&T and incineration), and S4 (WC&T, MRF, composting, and incineration). Based on the result of this study, MRF is the most environmentally beneficial unit operation while landfill without energy recovery is the most impactful unit operation. The result further revealed that no scenario had the best performance across all the impact categories. However, S3 can be considered as the most environmentally friendly option owing to its lowest impact in most of the impact categories. S3 has the lowest global warming potential (GWP) of 33.19 × 106 kgCO2eq, ozone depletion potential (ODP) of 0.563 kgCFC-11e, and photochemical ozone depletion potential (PODP) of 679.46 kgC2H2eq. Also, S4 can be regarded as the most impactful option owing to its highest contributions to PODP of 1044 kgC2H2eq, acidification potential (AP) of 892073.8 kgSO2eq, and eutrophication potential (EP) of 51292.98 MaxPO4-3eq. The result of this study will be found helpful in creating a complete impression of the environmental performance of waste management systems in Johannesburg, South Africa which will aid sustainable planning and decisions by the concerned sector.


Asunto(s)
Eliminación de Residuos , Administración de Residuos , Animales , Ambiente , Incineración , Estadios del Ciclo de Vida , Residuos Sólidos/análisis , Sudáfrica , Instalaciones de Eliminación de Residuos
7.
Environ Technol ; 43(20): 3175-3187, 2022 Aug.
Artículo en Inglés | MEDLINE | ID: mdl-33840353

RESUMEN

The transesterification of parsley seed oil using a heterogeneous catalyst prepared from Herring fishbone (HFB) was investigated in this study. The fishbone was calcined at 900oC for 4 h to convert the calcium phosphate in the bone to beta-tricalcium phosphate. The prepared catalyst was then characterized by employing scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS) and X-ray diffraction (XRD) analysis to determine its morphology and elemental composition. The results obtained revealed beta-tricalcium phosphate (ß-TCP) as the major constituent of the calcined HFB and also showed the presence of an insignificant portion of hydroxyapatite and calcium oxide. The synthesized heterogeneous catalyst showed good catalytic activity up to five times on reuse. The biodiesel yield of 93% was obtained using 3 wt% of catalyst amount, 65 oC temperature of the reaction, 1.5 h time, and 9:1 alcohol-to-oil ratio. Gas chromatography-mass spectrometry (GC-MS) and Fourier transform infrared spectrometry (FTIR) were utilized to characterize the produced biodiesel. Also, their fuel properties were within the American Society for Testing and Materials set limits.


Asunto(s)
Biocombustibles , Petroselinum , Animales , Biocombustibles/análisis , Fosfatos de Calcio , Catálisis , Esterificación , Peces , Aceites de Plantas/química
8.
Nanomicro Lett ; 14(1): 34, 2021 Dec 15.
Artículo en Inglés | MEDLINE | ID: mdl-34907459

RESUMEN

HIGHLIGHTS: Ti3C2Tx MXene-based coaxial zinc-ion hybrid fiber supercapacitors (FSCs) were fabricated with braided structure, which can be prepared continuously and present excellent flexibility and ultrastability. A sports watch driven by the watch belts which weaved uses the obtained zinc-ion hybrid FSC and LED arrays lighted by the FSCs under embedding into textiles, demonstrating the great potential application in smart wearable textiles. Zinc-ion hybrid fiber supercapacitors (FSCs) are promising energy storages for wearable electronics owing to their high energy density, good flexibility, and weavability. However, it is still a critical challenge to optimize the structure of the designed FSC to improve energy density and realize the continuous fabrication of super-long FSCs. Herein, we propose a braided coaxial zinc-ion hybrid FSC with several meters of Ti3C2Tx MXene cathode as core electrodes, and shell zinc fiber anode was braided on the surface of the Ti3C2Tx MXene fibers across the solid electrolytes. According to the simulated results using ANSYS Maxwell software, the braided structures revealed a higher capacitance compared to the spring-like structures. The resulting FSCs exhibited a high areal capacitance of 214 mF cm-2, the energy density of 42.8 µWh cm-2 at 5 mV s-1, and excellent cycling stability with 83.58% capacity retention after 5000 cycles. The coaxial FSC was tied several kinds of knots, proving a shape-controllable fiber energy storage. Furthermore, the knitted FSC showed superior stability and weavability, which can be woven into watch belts or embedded into textiles to power smart watches and LED arrays for a few days.

9.
ACS Omega ; 6(39): 25124-25137, 2021 Oct 05.
Artículo en Inglés | MEDLINE | ID: mdl-34632172

RESUMEN

This research work is focused on the investigation of the optimum condition for parsley seed oil (PSO) trans-esterification using a heterogeneous (CCB) and homogenous catalyst (KOH). The process parameters (alcohol: oil ratio, temperature, and catalyst loading) were varied to examine their effect on the percentage biodiesel yield using a Box-Behnken design embedded with the response surface methodology (RSM). Also, the heterogeneous catalyst was synthesized by calcining waste chicken bones at 900 °C for 4 h. Thereafter, scanning electron microscopy (SEM), X-ray fluorescence (XRF), energy-dispersive X-ray spectroscopy (EDS), Fourier-transform infrared spectroscopy (FT-IR) and X-ray diffraction (XRD) analysis were utilized to determine the morphology and elemental composition. Thermogravimetric analysis (TGA) was also adopted to assess the effect of calcination temperature on the prepared catalyst. The characterization analysis revealed the presence of hydroxyapatite as the major component, and the reusability test showed that it exhibited good catalytic performance for PSO transesterification. However, the optimization study revealed that the optimum reaction conditions of 9:1 alcohol: ratio, 60 °C reaction temperature, and 3 wt % catalysts gave 90% biodiesel yield, while the homogenous catalyst (used as the control transesterification experiment) under the same conditions gave an average yield of 96.33%. Gas chromatography-mass spectrometry (GC-MS) was utilized to characterize the produced biodiesel. Furthermore, the fuel characteristics of biodiesel were within the specifications of the ASTM D6751.

10.
Bioresour Bioprocess ; 8(1): 75, 2021.
Artículo en Inglés | MEDLINE | ID: mdl-34414064

RESUMEN

The global demand for sustainable energy is increasing due to urbanization, industrialization, population, and developmental growth. Transforming the large quantities of biomass resources such as agro-residues/wastes could raise the energy supply and promote energy mix. Residues of biomass instituted in the rural and industrial centers are enormous, and poor management of these residues results in several indescribable environmental threats. The energy potential of these residues can provide job opportunities and income for nations. The generation and utilization of dissimilar biomass as feedstock for energy production via densification could advance the diversity of energy crops. An increase in renewable and clean energy demand will likely increase the request for biomass residues for renewable energy generation via densification. This will reduce the environmental challenges associated with burning and dumping of these residues in an open field. Densification is the process of compacting particles together through the application of pressure to form solid fuels. Marketable densification is usually carried out using conventional pressure-driven processes such as extrusion, screw press, piston type, hydraulic piston press, roller press, and pallet press (ring and flat die). Based on compaction, densification methods can be categorized into high-pressure, medium-pressure, and low-pressure compactions. The common densification processes are briquetting, pelletizing, bailing, and cubing. They manufacture solid fuel with desirable fuel characteristics-physical, mechanical, chemical, thermal, and combustion characteristics. Fuel briquettes and pellets have numerous advantages and applications both in domestic and industrial settings. However, for biomass to be rationally and efficiently utilized as solid fuel, it must be characterized to determine its fuel properties. Herein, an overview of the densification of biomass residues as a source of sustainable energy is presented.

11.
Data Brief ; 38: 107274, 2021 Oct.
Artículo en Inglés | MEDLINE | ID: mdl-34430682

RESUMEN

Titanium alloy is widely used in many industries due to its unique weight to strength ratio and high corrosion resistance. A suitable method of joining Titanium and its alloys is using Tungsten Inert Gas (TIG) welding. A significant advantage of TIG welding over other fusion welding is its ability to use non-consumable electrodes. This research was carried out on Ti6Al4V alloy of 2-3 mm thickness using TIG welding. Current and gas flow rates were varied, with Argon used as the inert gas for the welding. The data and images presented in this article account for the mechanical (tensile and microhardness), fractography, and microstructural properties of the welded samples. This article will foster simulation of heat input and flux and mechanical properties of TIG-welded Ti6Al4V alloy.

12.
Langmuir ; 37(23): 7127-7137, 2021 Jun 15.
Artículo en Inglés | MEDLINE | ID: mdl-34048656

RESUMEN

Molybdenum disulfide (MoS2), a two-dimensional (2D) material, promises better desalination efficiency, benefiting from the small diffusion length. While the monolayer nanoporous MoS2 membrane has great potential in the reverse osmosis (RO) desalination membrane, multilayer MoS2 membranes are more feasible to synthesize and economical than the monolayer MoS2 membrane. Building on the monolayer MoS2 membrane knowledge, the effects of the multilayer MoS2 membrane in water desalination were explored, and the results showed that increasing the pore size from 3 to 6 Å resulted in higher permeability but with lower salt rejection. The salt rejection increases from 85% in a monolayer MoS2 membrane to about 98% in a trilayer MoS2 membrane. When averaged over all three types of membranes studied, the ions rejection follows the trend of trilayer > bilayer > monolayer. Besides, a narrow layer separation was found to play an important role in the successful rejection of salt ions in bilayer and trilayer membranes. This study aims to provide a collective understanding of this high permiselective MoS2 membrane's realization for water desalination, and the findings showed that the water permeability of the MoS2 monolayer membrane was in the order of magnitude greater than that of the conventional RO membrane and the nanoporous MoS2 membrane can have an important place in the purification of water.

13.
Waste Manag Res ; 39(8): 1058-1068, 2021 Aug.
Artículo en Inglés | MEDLINE | ID: mdl-33596781

RESUMEN

Sustainable planning of waste management is contingent on reliable data on waste characteristics and their variation across the seasons owing to the consequential environmental impact of such variation. Traditional waste characterization techniques in most developing countries are time-consuming and expensive; hence the need to address the issue from a modelling approach arises. In modelling the complexity within the system, a paradigm shift from the classical models to the intelligent models has been observed. The application of artificial intelligence models in waste management is gaining traction; however its application in predicting the physical composition of waste is still lacking. This study aims at investigating the optimal combinations of network architecture, training algorithm and activation functions that accurately predict the fraction of physical waste streams from meteorological parameters using artificial neural networks. The city of Johannesburg was used as a case study. Maximum temperature, minimum temperature, wind speed and humidity were used as input variables to predict the percentage composition of organic, paper, plastics and textile waste streams. Several sub-models were stimulated with combination of nine training algorithms and four activation functions in each single hidden layer topology with a range of 1-15 neurons. Performance metrics used to evaluate the accuracy of the system are, root mean square error, mean absolute deviation, mean absolute percentage error and correlation coefficient (R). Optimal architectures in the order of input layer-number of neurons in the hidden layer-output layer for predicting organic, paper, plastics and textile waste were 4-10-1, 4-14-1, 4-5-1 and 4-8-1 with R-values of 0.916, 0.862, 0.834 and 0.826, respectively at the testing phase. The result of the study verifies that waste composition prediction can be done in a single hidden-layer satisfactorily.


Asunto(s)
Inteligencia Artificial , Residuos Sólidos , Redes Neurales de la Computación , Estaciones del Año , Residuos Sólidos/análisis , Sudáfrica
14.
Membranes (Basel) ; 10(9)2020 Sep 18.
Artículo en Inglés | MEDLINE | ID: mdl-32961951

RESUMEN

In this study, we performed nanoindentation test using the molecular dynamic (MD) approach on a selected thin film of palladium, vanadium, copper and niobium coated on the vanadium substrate at a loading rate of 0.5 Å/ps. The thermosetting control is applied with temperature variance from 300 to 700 K to study the mechanical characteristics of the selected thin films. The effects of temperature on the structure of the material, piling-up phenomena and sinking-in occurrence were considered. The simulation results of the analysis and the experimental results published in this literature were well correlated. The analysis of temperature demonstrated an understanding of the impact of the behaviour. As the temperature decreases, the indentation load increases for loading and unloading processes. Hence, this increases the strength of the material. In addition, the results demonstrate that the modulus of elasticity and thin-film hardness decreases in the order of niobium, vanadium, copper and palladium as the temperature increases.

16.
Materials (Basel) ; 12(14)2019 Jul 18.
Artículo en Inglés | MEDLINE | ID: mdl-31323776

RESUMEN

A novel enhanced visible light absorption BiOCl/AgCl/BiVO4 heterojunction of photocatalysts could be obtained through a one-pot hydrothermal method used with two different pH solutions. There was a relationship between synthesis pH and the ratio of BiOCl to BiVO4 in XRD planes and their photocatalytic activity. The visible light photocatalytic performances of photocatalysts were evaluated via degradation of diclofenac (DCFF) as a pharmaceutical model pollutant. Furthermore, kinetic studies showed that DCF degradation followed pseudo-first-order kinetics. The photocatalytic degradation rates of BiOCl/AgCl/BiVO4 synthesized at pH = 1.2 and pH = 4 for DCF were 72% and 47%, respectively, showing the higher activity of the photocatalyst which was synthesized at a lower pH value. It was concluded that the excellent photocatalytic activity of BiOCl/AgCl/BiVO4 is due to the enhanced visible light absorption formation of a heterostructure, which increased the lifetime of photo-produced electron-hole pairs by creating a heterojunction. The influence of pH during synthesis on photocatalytic activity in order to create different phases was investigated. This work suggests that the BiOCl/AgCl/BiVO4 p-n heterojunction is more active when the ratio of BiOCl to BiVO4 is smaller, and this could be achieved simply by the pH adjustment. This is a promising method of modifying the photocatalyst for the purpose of pollutant degradation under visible light illumination.

17.
Sci Technol Adv Mater ; 20(1): 465-496, 2019.
Artículo en Inglés | MEDLINE | ID: mdl-31164953

RESUMEN

Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many applications owing to its distinct abilities. They include uniform deposition of conformal films with controllable thickness, even on complex three-dimensional surfaces, and can improve the efficiency of electronic devices. This technology has attracted significant interest both for fundamental understanding how the new functional materials can be synthesized by ALD and for numerous practical applications, particularly in advanced nanopatterning for microelectronics, energy storage systems, desalinations, catalysis and medical fields. This review introduces the progress made in ALD, both for computational and experimental methodologies, and provides an outlook of this emerging technology in comparison with other film deposition methods. It discusses experimental approaches and factors that affect the deposition and presents simulation methods, such as molecular dynamics and computational fluid dynamics, which help determine and predict effective ways to optimize ALD processes, hence enabling the reduction in cost, energy waste and adverse environmental impacts. Specific examples are chosen to illustrate the progress in ALD processes and applications that showed a considerable impact on other technologies.

18.
Int J Biol Macromol ; 132: 360-373, 2019 Jul 01.
Artículo en Inglés | MEDLINE | ID: mdl-30940592

RESUMEN

N, S-doped TiO2 (NST), N, S-doped ZnO (NSZ) and their composite with chitosan (NST/CS, NSZ/CS) were synthesized by sol gel-hydrothermal method. The prepared samples were characterized using XRD, FTIR, TEM and BET techniques. These photocatalysts were used for the photocatalytic degradation of tetracycline under visible light irradiation. At screening test, NST/CS had the highest tetracycline degradation efficiency of 91% for duration of 20 min under visible light. The blending of chitosan with NST increases the rate of photocatalytic degradation of tetracycline about 2 times. A detail characterization including HRTEM, SEM, EDS and DRS were conducted for NST/CS, the most active photocatalyst in this study. Photocatalytic activity test was conducted by varying tetracycline concentration, irradiation time, catalyst's concentration and pH using response surface methodology to find out the optimum condition for photocatalytic activity. The reusability of as-synthesized NST/CS was assessed which due to its high recoverability can be applied as an effective catalyst for degradation of organic substances in water and wastewater especially for degradation of emerging pollutants such pharmaceutical pollutants. The results from this work show a promising material for local authorities and pharmaceutical facilities to use for the treatment of pharmaceutical pollutants and tetracycline removal in water resource.


Asunto(s)
Quitosano/química , Nitrógeno/química , Fotólisis , Azufre/química , Tetraciclina/química , Titanio/química , Óxido de Zinc/química , Catálisis , Luz , Nanocompuestos/química , Aguas Residuales/química , Contaminantes Químicos del Agua/química
19.
Nanomaterials (Basel) ; 9(1)2019 Jan 03.
Artículo en Inglés | MEDLINE | ID: mdl-30609822

RESUMEN

Atomic scale control of the thickness of thin film makes atomic layer deposition highly advantageous in the preparation of high quality super-lattices. However, precisely controlling the film chemical stoichiometry is very challenging. In this study, we deposited SiOx film with different stoichiometry by plasma enhanced atomic layer deposition. After reviewing various deposition parameters like temperature, precursor pulse time, and gas flow, the silicon dioxides of stoichiometric (SiO2) and non-stoichiometric (SiO1.8 and SiO1.6) were successfully fabricated. X-ray photo-electron spectroscopy was first employed to analyze the element content and chemical bonding energy of these films. Then the morphology, structure, composition, and optical characteristics of SiOx film were systematically studied through atomic force microscope, transmission electron microscopy, X-ray reflection, and spectroscopic ellipsometry. The experimental results indicate that both the mass density and refractive index of SiO1.8 and SiO1.6 are less than SiO2 film. The energy band-gap is approved by spectroscopic ellipsometry data and X-ray photo-electron spectroscopy O 1s analysis. The results demonstrate that the energy band-gap decreases as the oxygen concentration decreases in SiOx film. After we obtained the Si-rich silicon oxide film deposition, the SiO1.6/SiO2 super-lattices was fabricated and its photoluminescence (PL) property was characterized by PL spectra. The weak PL intensity gives us greater awareness that more research is needed in order to decrease the x of SiOx film to a larger extent through further optimizing plasma-enhanced atomic layer deposition processes, and hence improve the photoluminescence properties of SiOx/SiO2 super-lattices.

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