Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection.

Releasing pre-strained two-dimensional nanomembranes to assemble on-chip three-dimensional devices is crucial for upcoming advanced electronic and optoelectronic applications. However, the release process is affected by many unclear factors, hindering the transition from laboratory to industrial applications. Here, we propose a quasistatic multilevel finite element modeling to assemble three-dimensional structures from two-dimensional nanomembranes and offer verification results by various bilayer nanomembranes. Take Si/Cr nanomembrane as an example, we confirm that the three-dimensional structural formation is governed by both the minimum energy state and the geometric constraints imposed by the edges of the sacrificial layer. Large-scale, high-yield fabrication of three-dimensional structures is achieved, and two distinct three-dimensional structures are assembled from the same precursor. Six types of three-dimensional Si/Cr photodetectors are then prepared to resolve the incident angle of light with a deep neural network model, opening up possibilities for the design and manufacturing methods of More-than-Moore-era devices.

Selected and Enhanced Single Whispering-Gallery Mode Emission from a Mesostructured Nanomembrane Microcavity.

Quantum sciences are revolutionizing computing and communication technologies, in which single-photon emitters are the key components for creating strong quantum entanglement. Color centers in diamonds in coupled-cavity systems are considered great candidates for the efficient generation of quantum carriers over other solid-state emitters. Owing to the multi-mode nature of high quality factor ( Q) diamond cavities, however, it is a grand challenge to the achievement of single photon emission with high rate and indistinguishability. To this end, a single-mode high- Q diamond cavity is highly desired. Here, we report a diamond mesostructured nanomembrane microcavity of a discrete rotational symmetry that selectively produces the desired single-mode emission in a broad spectrum. The strategic rolling up of a flexible diamond nanomembrane with aligned holes effectively defines the designed symmetry while maintaining the high- Q resonance through the whispering-gallery mode supported in the central hollow microcavity. The demonstrated diamond mesostructured microcavity features a distinct and enhanced single-mode emission, a step toward efficient quantum sources with designed positions or bands for quantum information technology.

Fabrication and Optical Properties of Strain-free Self-assembled Mesoscopic GaAs Structures.

We use a combined process of Ga-assisted deoxidation and local droplet etching to fabricate unstrained mesoscopic GaAs/AlGaAs structures exhibiting a high shape anisotropy with a length up to 1.2 µm and a width of 150 nm. We demonstrate good controllability over size and morphology of the mesoscopic structures by tuning the growth parameters. Our growth method yields structures, which are coupled to a surrounding quantum well and present unique optical emission features. Microscopic and optical analysis of single structures allows us to demonstrate that single structure emission originates from two different confinement regions, which are spectrally separated and show sharp excitonic lines. Photoluminescence is detected up to room temperature making the structures the ideal candidates for strain-free light emitting/detecting devices.

Observation of higher order radial modes in atomic layer deposition reinforced rolled-up microtube ring resonators.

We present a detailed investigation of the resonator properties of high-quality rolled-up SiO2 optical microtubes reinforced by atomic layer deposition. The evolution of the resonant modes with increasing film thickness and the transition to a multimode regime, including higher order radial modes, is discussed. Measurements and simulations show that the higher order modes exhibit high optical quality and an increased extension of the evanescent field from the resonator into the surrounding matrix, making them a promising solution for future on-chip sensor applications with increased sensitivity.

Sharp whispering-gallery modes in rolled-up vertical SiO2 microcavities with quality factors exceeding 5000.

Record high quality (Q) factors of 5400 in vertical microtube ring resonators operated in emission mode are demonstrated. This is achieved by rolling-up a differentially strained SiO2 layer. We also present a theoretical model to investigate the limit of the Q factor. This model especially includes the effect of interlayer voids in the rolled-up geometry, which is found to have a larger effect than scattering due to notches in the spiral shape.

Enhanced optical axial confinement in asymmetric microtube cavities rolled up from circular-shaped nanomembranes.

Asymmetric cone-like microtube cavities have been fabricated by unevenly rolling-up prestrained SiO/SiO(2) circular-shaped nanomembranes. Spatially localized axial resonant modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and windings along the tube axis. A theoretical model is applied to quantitatively explain and confirm our experimental results.

Lab-in-a-tube: on-chip integration of glass optofluidic ring resonators for label-free sensing applications.

The fabrication of tubular rolled-up optofluidic ring resonators (RU-OFRRs) based on glass (SiO(2)) material with high quality factors is reported. A novel methodology combining lab-on-a-chip fabrication methods and rolled-up nanotech is presented for the fabrication of fully integrated tubular optofluidic sensors. The microfluidic integration of several RU-OFRRs on one chip is solved by enclosing the microtubes with a patterned robust SU-8 polymeric matrix. A viewport on each microtube enables exact excitation and monitoring of whispering gallery modes with a photoluminescence spectroscopy system under constant ambient conditions, while exchanging the content of the RU-OFRR with liquids of different refractive indices. The refractrometric sensor capabilities are investigated regarding signal stability, sensitivity and reliability. The sensitivity of the integrated RU-OFRR, which is the response of the modes to the change in refractive index of the liquid, is up to 880 nm/refractive index units (RIU).

Tuning of optical resonances in asymmetric microtube cavities.

We tune optical resonances in rolled-up SiO/SiO(2) microtube cavities by gradually modifying the tube structure through asymmetrical postdeposition of SiO(2). Spectral blueshifts followed by redshifts of the resonant modes are observed in a thin-walled microtube (tube-I), which is attributed to a competition between shape deformation and effective increase of tube wall thickness. In contrast, only a monotonic redshift is detected when asymmetrical deposition is performed on a thick-walled microtube (tube-II). Distinct wavelength-dependent tuning was revealed in both kinds of tubes. Numerical calculations based on perturbation theory are carried out to explain and confirm the experimental results.

Directional roll-up of nanomembranes mediated by wrinkling.

We investigate the relaxation of rectangular wrinkled thin films intrinsically containing an initial strain gradient. A preferential rolling direction, depending on wrinkle geometry and strain gradient, is theoretically predicted and experimentally verified. In contrast to typical rolled-up nanomembranes, which bend perpendicular to the longer edge of rectangular patterns, we find a regime where rolling parallel to the longer edge of the wrinkled film is favorable. A nonuniform radius of the rolled-up film is well reproduced by elasticity theory and simulations of the film relaxation using a finite element method.

Lab-in-a-tube: detection of individual mouse cells for analysis in flexible split-wall microtube resonator sensors.

We report a method for the precise capturing of embryonic fibroblast mouse cells into rolled-up microtube resonators. The microtubes contain a nanometer-sized gap in their wall which defines a new type of optofluidic sensor, i.e., a flexible split-wall microtube resonator sensor, employed as a label-free fully integrative detection tool for individual cells. The sensor action works through peak sharpening and spectral shifts of whispering gallery modes within the microresonators under light illumination.

Rolled-up optical microcavities with subwavelength wall thicknesses for enhanced liquid sensing applications.

Microtubular optical microcavities from rolled-up ring resonators with subwavelength wall thicknesses have been fabricated by releasing prestressed SiO/SiO(2) bilayer nanomembranes from photoresist sacrificial layers. Whispering gallery modes are observed in the photoluminescence spectra from the rolled-up nanomembranes, and their spectral peak positions shift significantly when measurements are carried out in different surrounding liquids, thus indicating excellent sensing functionality of these optofluidic microcavities. Analytical calculations as well as finite-difference time-domain simulations are performed to investigate the light confinement in the optical microcavities numerically and to describe the experimental mode shifts very well. A maximum sensitivity of 425 nm/refractive index unit is achieved for the microtube ring resonators, which is caused by the pronounced propagation of the evanescent field in the surrounding media due to the subwavelength wall thickness design of the microcavity. Our optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bioanalytic systems.

Optical resonance tuning and polarization of thin-walled tubular microcavities.

We present experimental and finite-difference time-domain simulation results on the tunability of optical resonant modes of spiral microtube cavities, rolled-up from square patterned SiO/SiO(2) thin nanomembranes on glass substrates. The peak positions of resonant TM modes shift to lower energies by coating the microtube wall with Al(2)O(3) monolayers, which is well described by simulations. Moreover, a second group of tunable resonant modes appears beyond a certain critical thickness of the coated Al(2)O(3). The polarization of this group of modes is TE, as we find out by a detailed analysis of the polarization-dependent photoluminescence spectra.

Fabrication, self-assembly, and properties of ultrathin AlN/GaN porous crystalline nanomembranes: tubes, spirals, and curved sheets.

Ultrathin AlN/GaN crystalline porous freestanding nanomembranes are fabricated on Si(111) by selective silicon etching, and self-assembled into various geometries such as tubes, spirals, and curved sheets. Nanopores with sizes from several to tens of nanometers are produced in nanomembranes of 20-35 nm nominal thickness, caused by the island growth of AlN on Si(111). No crystal-orientation dependence is observed while releasing the AlN/GaN nanomembranes from the Si substrate indicating that the driving stress mainly originates from the zipping effect among islands during growth. Competition between different relaxation mechanisms is experimentally revealed for different nanomembrane geometries and well-described by numerical calculations. The cathodoluminescence emission from GaN nanomembranes reveals a weak peak close to the GaN bandgap, which is dramatically enhanced by electron irradiation.

Epitaxial quantum dots in stretchable optical microcavities.

Arrays of GaAs microring optical resonators with embedded InGaAs quantum dots (QDs) are placed on top of Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) piezoelectric actuators, which allow the microcavities to be reversibly "stretched" or "squeezed" by applying relatively large biaxial stresses at low temperatures. The emission energy of both QDs and optical modes red- or blue- shift depending on the strain sign, with the QD emission shifting more rapidly than the optical mode with applied strain. The QD energy shifts are used to estimate the strain in the structures based on linear deformation potential theory and the finite element method. The shift of the modes is attributed to both the physical deformation and the change in refractive index due to the photoelastic effect. Remarkably, excitonic emissions from different QDs are observed to shift at different rates, implying that this technique can be used to bring spatially separated excitons into resonance.

Self-Assembled Quantum Dot Molecules.

Semiconductor quantum dot molecules (QDMs) are systems composed of two or more closely spaced and interacting QDs. QDMs are receiving much attention both as playground for studying coupling and energy transfer processes between "artificial atoms" and as new systems, which substantially extend the range of possible applications of QDs. QDMs can be conveniently fabricated by self-assembly either through chemical synthesis or epitaxial growth. Although QDMs relying on the random occurrence of nearby QDs can be used for fundamental studies, special fabrication protocols must be used to create QDMs with well-defined properties. In this article, we focus on self-assembled QDMs obtained by epitaxial growth and embedded in a semiconductor matrix, which are appealing for the possible realization of quantum gates based on two-level systems defined in QDs. We provide a comprehensive overview of the development and current stage of the research on QDMs composed of vertically (in the growth direction) or laterally (in the growth plane) aligned QDs. The review highlights some recent milestone works and points out the challenges and future directions in the field.

Optical properties of a wrinkled nanomembrane with embedded quantum well.

A wrinkled nanomembrane with embedded quantum well (QW), fabricated by the partial release and bond back of epitaxial layers upon underetching, is investigated by spatially resolved micro-photoluminescence spectroscopy. From the observed QW transition energies and calculations based on the linear deformation potential theory, we find that the bonded back regions are fully relaxed and act on the strain state of the wrinkled QW. Light emission enhancement observed in the wrinkled QW is explained by interference contrast theory.