Sample thickness affects contrast and measured shape in TEM images and in electron tomograms.

We investigated the effect of nanoparticle (NP) image broadening and its contrast change dependence on a support matrix thickness in a transmission electron microscope (TEM). We measured the effect of NP size and atomic number on its image broadening. Based on the experimental TEM images we generated tomograms of NPs on four types of support matrix. The measured shape aspect ratio of the NPs in such tomograms depends on the geometry of the support matrix. For example, the aspect ratio of 6 nm NP placed on a thin film with window-frame support is 1.14, while the aspect ratio of 6 nm NP on a rod-shaped support with 910 nm diameter is 1.67 in a tomogram.

NanoMi: An open source electron microscope hardware and software platform.

We outline a public license (open source) electron microscopy platform, referred to as NanoMi. NanoMi offers a modular, flexible electron microscope platform that can be utilized for a variety of applications, such as microscopy education and development of proof-of-principle experiments, and can be used to complement an existing experimental apparatus. All components are ultra-high vacuum compatible and the electron optics elements are independent from the vacuum envelope. The individual optical components are mounted on a 127 mm (5-inch) diameter half-pipe, allowing customizing of electron optics for a variety of purposes. The target capabilities include SEM, TEM, scanning TEM (STEM), and electron diffraction (ED) at up to 50 keV incident electron energy. The intended image resolution in SEM, TEM and STEM modes is ≈ 10 nm. We describe the existing components and the interfaces among components that ensure their compatibility and interchangeability. The paper provides a resource for those who consider building or utilizing their own NanoMi.

Origin of spurious intensity in vacuum near sample edge in bright field TEM images.

Bright-field transmission electron microscope (BFTEM) images exhibit spurious image intensity in the vacuum near the sample edge. The spurious intensity gradually decreases with increasing distance from the sample edge. By taking into account angular and energy loss distribution of the scattered electrons and lens aberrations, the origin of the spurious intensity of BFTEM images can be explained. The spurious intensity extent and magnitude can be significantly reduced by using either electron energy filtering or a small collection semiangle.

Higher-order structure of barley chromosomes observed by electron tomography.

The higher order structure of the metaphase chromosome has been an enigma for over a century and several different models have been presented based on results obtained by a variety of techniques. Some disagreements in the results between methods have possibly arisen from artifacts caused during sample preparation such as staining and dehydration. Therefore, we treated barley chromosomes with ionic liquid to minimize the effects of dehydration. We also observed chromosomes on a film with holes to keep pristine chromosome structure from being flattened as seen when placed on a continuous support film. A chromosome placed over a hole in a thin carbon film was mounted on a tomography holder, and its structure was observed in three dimensions (3D) using electron tomography. We found that there are periodic structures with 300-400 nm pitch along the axis in barley chromosomes. The pitch sizes are larger than those observed in human chromosomes.

Deep ultra-violet plasmonics: exploiting momentum-resolved electron energy loss spectroscopy to probe germanium.

Germanium is typically used for solid-state electronics, fiber-optics, and infrared applications, due to its semiconducting behavior at optical and infrared wavelengths. In contrast, here we show that the germanium displays metallic nature and supports propagating surface plasmons in the deep ultraviolet (DUV) wavelengths, that is typically not possible to achieve with conventional plasmonic metals such as gold, silver, and aluminum. We measure the photonic band spectrum and distinguish the plasmonic excitation modes: bulk plasmons, surface plasmons, and Cherenkov radiation using a momentum-resolved electron energy loss spectroscopy. The observed spectrum is validated through the macroscopic electrodynamic electron energy loss theory and first-principles density functional theory calculations. In the DUV regime, intraband transitions of valence electrons dominate over the interband transitions, resulting in the observed highly dispersive surface plasmons. We further employ these surface plasmons in germanium to design a DUV radiation source based on the Smith-Purcell effect. Our work opens a new frontier of DUV plasmonics to enable the development of DUV devices such as metasurfaces, detectors, and light sources based on plasmonic germanium thin films.

High-Energy Electron Scattering in Thick Samples Evaluated by Bright-Field Transmission Electron Microscopy, Energy-Filtering Transmission Electron Microscopy, and Electron Tomography.

Energy-filtering transmission electron microscopy (TEM) and bright-field TEM can be used to extract local sample thickness $t$ and to generate two-dimensional sample thickness maps. Electron tomography can be used to accurately verify the local $t$. The relations of log-ratio of zero-loss filtered energy-filtering TEM beam intensity ($I_{{\rm ZLP}}$) and unfiltered beam intensity ($I_{\rm u}$) versus sample thickness $t$ were measured for five values of collection angle in a microscope equipped with an energy filter. Furthermore, log-ratio of the incident (primary) beam intensity ($I_{\rm p}$) and the transmitted beam $I_{{\rm tr}}$ versus $t$ in bright-field TEM was measured utilizing a camera before the energy filter. The measurements were performed on a multilayer sample containing eight materials and thickness $t$ up to 800 nm. Local thickness $t$ was verified by electron tomography. The following results are reported:• The maximum thickness $t_{{\rm max}}$ yielding a linear relation of log-ratio, $\ln ( {I_{\rm u}}/{I_{{\rm ZLP}}})$ and $\ln ( {I_{\rm p}}/{I_{{\rm tr}}} )$, versus $t$.• Inelastic mean free path ($\lambda _{{\rm in}}$) for five values of collection angle.• Total mean free path ($\lambda _{{\rm total}}$) of electrons excluded by an angle-limiting aperture.• $\lambda _{{\rm in}}$ and $\lambda _{{\rm total}}$ are evaluated for the eight materials with atomic number from $\approx$10 to 79.The results can be utilized as a guide for upper limit of $t$ evaluation in energy-filtering TEM and bright-field TEM and for optimizing electron tomography experiments.

Chromosome inner structure investigation by electron tomography and electron diffraction in a transmission electron microscope.

Our understanding of the inner structure of metaphase chromosomes remains inconclusive despite intensive studies using multiple imaging techniques. Transmission electron microscopy has been extensively used to visualize chromosome ultrastructure. This review summarizes recent results obtained using two transmission electron microscopy-based techniques: electron tomography and electron diffraction. Electron tomography allows advanced three-dimensional imaging of chromosomes, while electron diffraction detects the presence of periodic structures within chromosomes. The combination of these two techniques provides results contributing to the understanding of local structural organization of chromatin fibers within chromosomes.

Phase plates in the transmission electron microscope: operating principles and applications.

In this paper, we review the current state of phase plate imaging in a transmission electron microscope. We focus especially on the hole-free phase plate design, also referred to as the Volta phase plate. We discuss the implementation, operating principles and applications of phase plate imaging. We provide an imaging theory that accounts for inelastic scattering in both the sample and in the hole-free phase plate.

Higher-Order Structure of Human Chromosomes Observed by Electron Diffraction and Electron Tomography.

It is well known that two DNA molecules are wrapped around histone octamers and folded together to form a single chromosome. However, the nucleosome fiber folding within a chromosome remains an enigma, and the higher-order structure of chromosomes also is not understood. In this study, we employed electron diffraction which provides a noninvasive analysis to characterize the internal structure of chromosomes. The results revealed the presence of structures with 100­200 nm periodic features directionally perpendicular to the chromosome axis in unlabeled isolated human chromosomes. We also visualized the 100­200 nm periodic features perpendicular to the chromosome axis in an isolated chromosome whose DNA molecules were specifically labeled with OsO4 using electron tomography in 300 keV and 1 MeV transmission electron microscopes.

Nanoparticle size and 3D shape measurement by electron tomography: An Inter-Laboratory Comparison.

Electron tomography (ET) has been used for quantitative measurement of shape and size of objects in three dimensions (3D) for many years. However, systematic investigation of repeatability and reproducibility of ET has not been evaluated in detail. To assess the reproducibility and repeatability of a protocol for measuring size and three-dimensional (3D) shape parameters for nanoparticles (NPs) by ET, an inter-laboratory comparison (ILC) has been performed. The ILC included six laboratories and six instruments models from three instrument manufacturers following a standard measurement protocol. A technical specification describing the normative steps of the protocol is published by the International Standards Organization (ISO). Gold NPs with 30 nm nominal diameter contained within a rod-shaped carbon support were measured. The use of a rod-shaped sample support eliminated the missing wedge effect in the experimental tilt series of projected images for improved quantification. A total of 443 NPs were initially measured by NRC-NANO and then 115 out of the 443 NPs were measured by five other labs to compare measurands such as the Volume (V), maximum Feret diameter (Fmax), minimum Feret diameter (Fmin), volume-equivalent diameter (Deq) and aspect ratio (Frat) of the NPs. The results of the five labs were compared with the results obtained at NRC-NANO. The maximum disagreement in measurements of Fmin and Fmax obtained by the participating labs did not exceed 7 %. The measured Deq was between 27.5 nm and 30.3 nm in agreement with the NP manufacturer's specification (28 nm-32 nm). In addition to the above, the influence of the missing wedge effect and beam-induced NP movement was quantified based on the differences of the results between labs.

Toward the quantitative the interpretation of hole-free phase plate images in a transmission electron microscope.

We present progress toward the quantitative interpretation of phase contrast images obtained using a hole-free phase plate (HFPP) in a transmission electron microscope (TEM). We consider a sinusoidal phase grating test object composed of ~5 nm deep groves in a ~13 nm thick amorphous silicon membrane. The periodic grating splits the beam current into direct beam and diffracted side beams in the focal plane of the imaging lens, where the HFPP is located. The physical separation between the beams allows for a detailed study of the HFPP phase shift evolution and its effect on image contrast. The residual phase shift of the electron beam footprint on the phase plate was measured by electron holography and used as input to image simulations that were compared to experimental data. Our results confirm that phase contrast is established by the phase difference between the direct and side beams, which we can estimate by fitting the image contrast evolution in time with an analytical formula describing the image intensity of a sinusoidal strong phase object. We also observed contrast reversal and frequency doubling of the grating image with time, which we interpret as the phase contrast arising from the interference between side beams becoming dominant. Another observation is the lateral displacement of the image fringes, which can be accounted for by a phase difference between the side beams.

Parameters affecting the accuracy of nanoparticle shape and size measurement in 3D.

While electron tomography can be used to visualize objects at nanoscale, it is difficult to perform reproducible quantitative measurements. Here we measure the shape and size of nanoparticles (NPs) in three dimensions (3D) using electron tomography. We evaluated the accuracy of maximum Feret diameter (Feretmax), minimum Feret diameter (Feretmini) and volume of NPs measurements from reconstructed 3D images which were obtained from data acquired with varied electron dose. We perform both simulations and experiment to clarify what factors effect on the accuracy of the NP shape measurement. Based on the results, suitable reconstruction methods and threshold for binarization were evaluated. We also report comparison results obtained on exactly the same samples in two different laboratories.

Fast electrons interacting with a natural hyperbolic medium: bismuth telluride.

Fast electrons interacting with matter have been instrumental for probing bulk and surface photonic excitations including Cherenkov radiation and plasmons. Additionally, fast electrons are ideal to investigate unique bulk and longitudinal photonic modes in hyperbolic materials at large wavevectors difficult to probe optically. Here, we use momentum-resolved electron energy loss spectroscopy (k-EELS) to perform the first experimental demonstration of high-k modes and hyperbolic Cherenkov radiation in the natural hyperbolic material Bi2Te3. This work establishes Bi2Te3 as one of the few viable natural hyperbolic materials in the visible and paves the way for k-EELS as a fundamental tool to probe hyperbolic media.

Charging of electron beam irradiated amorphous carbon thin films at liquid nitrogen temperature.

We studied the charging behavior of an amorphous carbon thin film kept at liquid-nitrogen temperature under focused electron-beam irradiation. Negative charging of the thin film is observed. The charging is attributed to a local change in the work function of the thin film induced by electron-stimulated desorption similar to the working principle of the hole free phase plate in its Volta potential implementation at elevated temperature. The negative bias of the irradiated film arises from the electron beam induced desorption of water molecules from the carbon film surface. The lack of positive charging, which is expected for non-conductive materials, is explained by a sufficient electrical conductivity of the carbon thin film even at liquid-nitrogen temperature as proven by multi-probe scanning tunneling microscopy and spectroscopy measurements.

Hole free phase plate tomography for materials sciences samples.

We report, for the first time, the three dimensional reconstruction (3D) of a transistor from a microprocessor chip and roughness of molecular electronic junction obtained by electron tomography with Hole Free Phase Plate (HFPP) imaging. The HFPP appears to enhance contrast between inorganic materials and also increase the visibility of interfaces between different materials. We demonstrate that the degree of enhancement varies depending on material and thickness of the samples using experimental and simulation data.

Wavelet transform-based electron tomography measurement of buried interface roughness.

Interface roughness is a critical parameter determining the performance of semiconductor devices. We show that a continuous wavelet transform is useful to describe not only the magnitude of the interface roughness, but also the spatial frequencies that describe the interface. We propose a simple presentation of the results that makes it convenient to compare between interfaces. In particular, an average and maximum value wavelet profile that is obtained from a series of one dimensional wavelet transforms provides a traceable and quick survey of the results. We demonstrate the wavelet transform method using both computer simulations and by applying it to experimental data obtained by electron tomography of a test sample and to a molecular layer interface. Wavelet descriptions of the interface roughness suffers less from the presence of shot noise in the experimental data than the traditional root mean square error description of interface roughness. An increase in lateral dimensions of an interface that has large features increases the content of low spatial frequencies in wavelet transforms. In comparison, the value of root mean square error increases in an untraceable manner with the same increase in lateral dimensions on the same interface. Morse wavelets with γ = 9 and ß = 3 appear to be a suitable choice for applications in interface roughness measurement.

Thermal expansion coefficient measurement from electron diffraction of amorphous films in a TEM.

We measured the linear thermal expansion coefficients of amorphous 5-30 nm thick SiN and 17 nm thick Formvar/Carbon (F/C) films using electron diffraction in a transmission electron microscope. Positive thermal expansion coefficient (TEC) was observed in SiN but negative coefficients in the F/C films. In case of amorphous carbon (aC) films, we could not measure TEC because the diffraction radii required several hours to stabilize at a fixed temperature.

Evaluation of electron tomography reconstruction methods for interface roughness measurement.

We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement.

Charging of carbon thin films in scanning and phase-plate transmission electron microscopy.

A systematic study on charging of carbon thin films under intense electron-beam irradiation was performed in a transmission electron microscope to identify the underlying physics for the functionality of hole-free phase plates. Thin amorphous carbon films fabricated by different deposition techniques and single-layer graphene were studied. Clean thin films at moderate temperatures show small negative charging while thin films kept at an elevated temperature are stable and not prone to beam-generated charging. The charging is attributed to electron-stimulated desorption (ESD) of chemisorbed water molecules from the thin-film surfaces and an accompanying change of work function. The ESD interpretation is supported by experimental results obtained by electron-energy loss spectroscopy, hole-free phase plate imaging, secondary electron detection and x-ray photoelectron spectroscopy as well as simulations of the electrostatic potential distribution. The described ESD-based model explains previous experimental findings and is of general interest to any phase-related technique in a transmission electron microscope.