RESUMEN
We introduce a novel piezoelectric stepper motor featuring high compactness, rigidity, and any direction operability. Here, not only is the structure of high novelty but also the working principle very simple. The piezo stacks unit is sandwiched between two spring finger pieces, with almost equal clamping forces applied between the top of the piezo stacks' unit and the spring finger piece. Applying individual driving signals to each of the five piezo stack pairs, causing deformation one by one in the same direction, followed by simultaneous recovery in the reverse direction, enables movement of the frame part. The optimized clamping force of the piezoelectric stack units and spring fingers ensures maximum output force. The motor's operational capability at low threshold voltages, specifically 8 V for downward movement and 10 V for upward movement, confirmed its efficacy in both vertical and horizontal directions. The motor's operational capability at a low threshold voltage of 10 V confirmed its efficacy in both vertical and horizontal directions. At room temperature, step size ranges from 0.3 to 7.4 µm at 20 Hz frequency and varying driving voltage from 10 to 180 V. It has a maximum travel range of about 5 mm and can lift a maximum load of 220 g in an upward direction, so the maximum output force generated by this motor is 2.2 N. The compact and rigid design is capable of building an atomically resolved scanning probe microscope, and its working ability has the potential to use the cleavage of different types of samples in limited space environments, such as the small-bore superconducting magnet and low temperature.
RESUMEN
Scanning tunneling microscope (STM) is a renowned scientific tool for obtaining high-resolution atomic images of materials. Herein, we present an innovative design of the scanning unit with a compact yet powerful inertial piezoelectric motor inspired by the Spider Drive motor principle. The scanning unit mainly consists of a small 9 mm long piezoelectric tube scanner (PTS), one end of which is coaxially connected to the main sapphire body of the STM. Of particular emphasis in this design is the piezoelectric shaft (PS), constructed from piezoelectric material instead of conventional metallic or zirconium materials. The PS is a rectangular piezoelectric stack composed of two piezoelectric plates, which are elastically clamped on the inner wall of the PTS via a spring strip. The PTS and PS expand and contract independently with each other to improve the inertial force and reduce the threshold voltage. To ensure the stability of the PS and balance the stepping performance of the inertial motor, a counterweight, and a matching conical spring are fixed at the tail of the PS. This innovative design allows for the assessment of scanning unit performance by applying a driving signal, threshold voltage is 50 V at room temperature. Step sizes vary from 0.1 to 1 µm by changing the driving signal at room temperature. Furthermore, we successfully obtained atomic-resolution images of a highly oriented pyrolytic graphite (HOPG) sample and low drift rates of 23.4 pm/min and 34.6 pm/min in X-Y plane and Z direction, respectively, under ambient conditions. This small, compact STM unit has the potential for the development of a rotatable STM for use in cryogen-free magnets, and superconducting magnets.