Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide.

Silicon-on-insulator (SOI) technology improves the performance of devices by reducing parasitic capacitance. Devices based on SOI or silicon-on-sapphire technology are primarily used in high-performance radio frequency (RF) and radiation sensitive applications as well as for reducing the short channel effects in microelectronic devices. Despite their advantages, the high substrate cost and overheating problems associated with complexities in substrate fabrication as well as the low thermal conductivity of silicon oxide prevent broad applications of this technology. To overcome these challenges, we describe a new approach of using beryllium oxide (BeO). The use of atomic layer deposition (ALD) for producing this material results in lowering the SOI wafer production cost. Furthermore, the use of BeO exhibiting a high thermal conductivity might minimize the self-heating issues. We show that crystalline Si can be grown on ALD BeO and the resultant devices exhibit potential for use in advanced SOI technology applications.

CNT/PDMS-based canal-typed ear electrodes for inconspicuous EEG recording.

OBJECTIVE: Current electroencephalogram (EEG) monitoring systems typically require cumbersome electrodes that must be pasted on a scalp, making a private recording of an EEG in a public place difficult. We have developed a small, user friendly, biocompatible electrode with a good appearance for inconspicuous EEG monitoring. APPROACH: We fabricated carbon nanotube polydimethylsiloxane (CNT/PDMS)-based canal-type ear electrodes (CEE) for EEG recording. These electrodes have an additional function, triggering sound stimulation like earphones and recording EEG simultaneously for auditory brain-computer interface (BCI). The electrode performance was evaluated by a standard EEG measurement paradigm, including the detection of alpha rhythms and measurements of N100 auditory evoked potential (AEP), steady-state visual evoked potential (SSVEP) and auditory steady-state response (ASSR). Furthermore, the bio- and skin-compatibility of CNT/PDMS were tested. MAIN RESULTS: All feasibility studies were successfully recorded with the fabricated electrodes, and the biocompatibility of CNT/PDMS was also proved. SIGNIFICANCE: These electrodes could be used to monitor EEG clinically, in ubiquitous health care and in brain-computer interfaces.