RESUMEN
We propose low-energy, broad-beam He+ ion irradiation as a novel processing technique for the generation of Nb2O5 surface nanostructures due to its relative simplicity and scalability in a commercial setting. Since there have been relatively few studies involving the interaction of high-fluence, low-energy He+ ion irradiation and Nb (or its oxidized states), this systematic study explores both effects of fluence and sample temperature during irradiation on resulting surface morphology. Detailed normal and cross-sectional scanning electron microscopy (SEM) studies reveal subsurface He bubble formation and elucidate potential driving mechanisms for nanostructure evolution. A combination of specular optical reflectivity and X-ray photoelectron spectroscopy (XPS) is also used to gain additional information on roughness and stoichiometry of irradiated surfaces. Our investigations show significant surface modification for all tested irradiation conditions; the resulting surface structure size and geometry have a strong dependence on both sample temperature during irradiation and total ion fluence. Optical reflectivity measurements on irradiated surfaces demonstrate increased surface roughening with increasing ion fluence, and XPS shows higher oxidation levels for samples irradiated at lower temperatures, suggesting larger surface roughness and porosity. Overall, it was found that low-energy He+ ion irradiation is an efficient processing technique for nanostructure formation, and surface structures are highly tunable by adjusting ion fluence and Nb2O5 sample temperature during irradiation. These findings may have excellent potential applications for solar energy conversion through improved efficiency due to effective light absorption.