Roadmap for Optical Metasurfaces.

Metasurfaces have recently risen to prominence in optical research, providing unique functionalities that can be used for imaging, beam forming, holography, polarimetry, and many more, while keeping device dimensions small. Despite the fact that a vast range of basic metasurface designs has already been thoroughly studied in the literature, the number of metasurface-related papers is still growing at a rapid pace, as metasurface research is now spreading to adjacent fields, including computational imaging, augmented and virtual reality, automotive, display, biosensing, nonlinear, quantum and topological optics, optical computing, and more. At the same time, the ability of metasurfaces to perform optical functions in much more compact optical systems has triggered strong and constantly growing interest from various industries that greatly benefit from the availability of miniaturized, highly functional, and efficient optical components that can be integrated in optoelectronic systems at low cost. This creates a truly unique opportunity for the field of metasurfaces to make both a scientific and an industrial impact. The goal of this Roadmap is to mark this "golden age" of metasurface research and define future directions to encourage scientists and engineers to drive research and development in the field of metasurfaces toward both scientific excellence and broad industrial adoption.

Dual-Resonance Nanostructures for Color Downconversion of Colloidal Quantum Emitters.

We present a dual-resonance nanostructure made of a titanium dioxide (TiO2) subwavelength grating to enhance the color downconversion efficiency of CdxZn1-xSeyS1-y colloidal quantum dots (QDs) emitting at ∼530 nm when excited with a blue light at ∼460 nm. A large mode volume can be created within the QD layer by the hybridization of the grating resonances and waveguide modes, resulting in large absorption and emission enhancements. Particularly, we achieved polarized light emission with a maximum photoluminescence enhancement of ∼140 times at a specific angular direction and a total enhancement of ∼34 times within a 0.55 numerical aperture (NA) of the collecting objective. The enhancement encompasses absorption, Purcell and outcoupling enhancements. We achieved a total absorption of 35% for green QDs with a remarkably thin color conversion layer of ∼400 nm. This work provides a guideline for designing large-volume cavities for absorption/fluorescence enhancement in microLED display, detector, or photovoltaic applications.

Electrically Tunable Reflective Metasurfaces with Continuous and Full-Phase Modulation for High-Efficiency Wavefront Control at Visible Frequencies.

All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of postfabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting active and continuous resonance tuning with associated 2π phase control and uncoupled amplitude. Dynamic wavefront shaping is demonstrated by programming 96 individually addressable electrodes with a small pixel pitch of ∼1 µm. The small pixel size is facilitated by the reduced LC thickness, strongly suppressing cross-talk among pixels. This device is used to demonstrate dynamic beam steering with a wide field-of-view and high absolute diffraction efficiencies. We believe that our demonstration may help realize next-generation, high-resolution SLMs, with wide applications in dynamic holography, tunable optics, and light detection and ranging (LiDAR), to mention a few.

Photon pairs bi-directionally emitted from a resonant metasurface.

Metasurfaces are artificially structured surfaces able to control the properties of light at subwavelength scales. While, initially, they have been proposed as means to control classical optical fields, they are now emerging as nanoscale sources of quantum light, in particular of entangled photons with versatile properties. Geometric resonances in metasurfaces have been recently used to engineer the frequency spectrum of entangled photons, but the emission directivity was so far less studied. Here, we generate photon pairs via spontaneous parametric down conversion from a metasurface supporting a quasi-bound state in the continuum (BIC) leading to remarkable emission directivities. The pair generation rate is enhanced 67 times compared to the case of an unpatterned film of the same thickness and material. At the wavelength of the quasi-BIC resonance, photons are mostly emitted backwards, while their partners, spectrally detuned by only 8 nm, are emitted forwards. This behavior demonstrates fine spectral splitting of entangled photons and their bi-directional emission, never before observed in nanoscale sources. We expect this work to be a starting point for the efficient demultiplexing of photons in nanoscale quantum optics.

Polarization-Tunable Perovskite Light-Emitting Metatransistor.

Emerging immersive visual communication technologies require light sources with complex functionality for dynamic control of polarization, directivity, wavefront, spectrum, and intensity of light. Currently, this is mostly achieved by free space bulk optic elements, limiting the adoption of these technologies. Flat optics based on artificially structured metasurfaces that operate at the sub-wavelength scale are a viable solution, however, their integration into electrically driven devices remains challenging. Here, a radically new approach to monolithic integration of a dielectric metasurface into a perovskite light-emitting transistor is demonstrated. It is shown that nanogratings directly structured on top of the transistor channel yield an 8-fold increase of electroluminescence intensity and dynamic tunability of polarization. This new light-emitting metatransistor device concept opens unlimited opportunities for light management strategies based on metasurface design and integration.

Programmable Wavefront Control in the Visible Spectrum Using Low-Loss Chalcogenide Phase-Change Metasurfaces.

All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change materials (PCMs), which provide fast, low energy, and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid-infrared and near-infrared spectrum using different chalcogenides. In the visible spectral range, however, very few devices have demonstrated full phase manipulation, high efficiencies, and reversible optical modulation. In this work, a programmable all-dielectric Huygens' metasurface made of antimony sulfide (Sb2 S3 ) PCM is experimentally demonstrated, a low loss and high-index material in the visible spectral range with a large contrast (≈0.5) between its amorphous and crystalline states. ≈2π phase modulation is shown with high associated transmittance and it is used to create programmable beam-steering devices. These novel chalcogenide PCM metasurfaces have the potential to emerge as a platform for next-generation spatial light modulators and to impact application areas such as programmable and adaptive flat optics, light detection and ranging (LiDAR), and many more.

Phase-Change Perovskite Microlaser with Tunable Polarization Vortex.

Metasurfaces supporting optical bound states in the continuum (BICs) are emerging as simple and compact optical cavities to realize polarization-vortex lasers. The winding of the polarization around the singularity defines topological charges which are generally set by the cavity design and cannot be altered without changing geometrical parameters. Here, a subwavelength-thin phase-change halide perovskite BIC metasurface functioning as a tunable polarization vortex microlaser is demonstrated. Upon the perovskite structural phase transitions, both its refractive index and gain vary substantially, inducing reversible and bistable switching between distinct polarization vortexes underpinned by opposite topological charges. Dynamic tuning and switching of the resulting vector beams may find use in microscopy imaging, particle trapping and manipulation, and optical data storage.

Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography.

Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.

High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities.

Spatial light modulators (SLMs) are the most relevant technology for dynamic wavefront manipulation. They find diverse applications ranging from novel displays to optical and quantum communications. Among commercial SLMs for phase modulation, Liquid Crystal on Silicon (LCoS) offers the smallest pixel size and, thus, the most precise phase mapping and largest field of view (FOV). Further pixel miniaturization, however, is not possible in these devices due to inter-pixel cross-talks, which follow from the high driving voltages needed to modulate the thick liquid crystal (LC) cells that are necessary for full phase control. Newly introduced metasurface-based SLMs provide means for pixel miniaturization by modulating the phase via resonance tuning. These devices, however, are intrinsically monochromatic, limiting their use in applications requiring multi-wavelength operation. Here, we introduce a novel design allowing small pixel and multi-spectral operation. Based on LC-tunable Fabry-Perot nanocavities engineered to support multiple resonances across the visible range (including red, green and blue wavelengths), our design provides continuous 2π phase modulation with high reflectance at each of the operating wavelengths. Experimentally, we realize a device with 96 pixels (~1 µm pitch) that can be individually addressed by electrical biases. Using it, we first demonstrate multi-spectral programmable beam steering with FOV~18° and absolute efficiencies exceeding 40%. Then, we reprogram the device to achieve multi-spectral lensing with tunable focal distance and efficiencies ~27%. Our design paves the way towards a new class of SLM for future applications in displays, optical computing and beyond.

Near unity transmission and full phase control with asymmetric Huygens' dielectric metasurfaces for holographic projections.

Huygens' metasurfaces are transparent arrays of nanostructures that enable phase-front manipulation. This is achieved by simultaneous excitation of electric dipole (ED) and magnetic dipole (MD) resonances with equal amplitudes and phases in the constituent meta-atoms. In usual designs, the size changes of the meta-atoms, necessary to map the phase front, can detune the overlapping of ED and MD resonances, decreasing the transmission and limiting the operating bandwidth. In this report, we demonstrate that ED and MD resonances can be almost perfectly tuned together over a large wavelength range, keeping their spectral overlap, in a silicon metasurface by using anisotropic meta-atoms. In particular, we show near-unity transmission (>95% in simulations) and 2π phase control in a wavelength range from 760 to 815 nm using cuboidal nanoantennas. Using this concept, we also experimentally demonstrate clear reconstruction from holograms of a single metasurface spanning the near infrared and the whole visible spectral range.

Nanoscale mapping of optically inaccessible bound-states-in-the-continuum.

Bound-states-in-the-continuum (BIC) is an emerging concept in nanophotonics with potential impact in applications, such as hyperspectral imaging, mirror-less lasing, and nonlinear harmonic generation. As true BIC modes are non-radiative, they cannot be excited by using propagating light to investigate their optical characteristics. In this paper, for the 1st time, we map out the strong near-field localization of the true BIC resonance on arrays of silicon nanoantennas, via electron energy loss spectroscopy with a sub-1-nm electron beam. By systematically breaking the designed antenna symmetry, emissive quasi-BIC resonances become visible. This gives a unique experimental tool to determine the coherent interaction length, which we show to require at least six neighboring antenna elements. More importantly, we demonstrate that quasi-BIC resonances are able to enhance localized light emission via the Purcell effect by at least 60 times, as compared to unpatterned silicon. This work is expected to enable practical applications of designed, ultra-compact BIC antennas such as for the controlled, localized excitation of quantum emitters.

Bound State in the Continuum in Nanoantenna-Coupled Slab Waveguide Enables Low-Threshold Quantum-Dot Lasing.

Colloidal quantum dots (CQDs) are a promising gain material for solution-processed, wavelength-tunable lasers, with potential application in displays, communications, and biomedical devices. In this work, we combine a CQD film with an array of nanoantennas, made of titanium dioxide cylinders, to achieve lasing via bound states in the continuum (BICs). Here, the BICs are symmetry-protected cavity modes with giant quality factors, arising from slab waveguide modes in the planar CQD film, coupled to the periodic nanoantenna array. We engineer the thickness of the CQD film and size of the nanoantennas to achieve a BIC with good spatial and spectral overlap with the CQDs, based on a second-order transverse-electric (TE)-polarized waveguide mode. We obtain room-temperature lasing with a low threshold of approximately 11 kW/cm2 (peak intensity) under 5-ns-pulsed optical excitation. This work sheds light on the optical modes in solution-processed, distributed-feedback lasers and highlights BICs as effective, versatile, surface-emitting lasing modes.

Silicon Nanoantenna Mix Arrays for a Trifecta of Quantum Emitter Enhancements.

Dielectric nanostructures have demonstrated optical antenna effects due to Mie resonances. Previous work has exhibited enhancements in absorption, emission rates and directionality with practical limitations. In this paper, we present a Si mix antenna array to achieve a trifecta enhancement of ∼1200-fold with a Purcell factor of ∼47. The antenna design incorporates ∼10 nm gaps, within which fluorescent molecules strongly absorb the pump laser energy through a resonant mode. In the emission process, the antenna array increases the radiative decay rates of the fluorescence molecules via a Purcell effect and provides directional emission through a separate mode. This work could lead to novel CMOS-compatible platforms to enhance fluorescence for biological and chemical applications.

Continuous Wave Second Harmonic Generation Enabled by Quasi-Bound-States in the Continuum on Gallium Phosphide Metasurfaces.

Resonant metasurfaces are an attractive platform for enhancing the nonlinear optical processes, such as second harmonic generation (SHG), since they can generate large local electromagnetic fields while relaxing the phase-matching requirements. Here, we demonstrate visible range, continuous wave (CW) SHG by combining the attractive material properties of gallium phosphide with high quality-factor photonic modes enabled by bound states in the continuum. We obtain efficiencies around 5e-5% W-1 when the system is pumped at 1200 nm wavelength with CW intensities of 1 kW/cm2. Moreover, we measure external efficiencies of 0.1% W-1 with pump intensities of only 10 MW/cm2 for pulsed irradiation. This efficiency is higher than the values previously reported for dielectric metasurfaces, but achieved here with pump intensities that are two orders of magnitude lower. These results take metasurface-based SHG a step closer to practical applications.

Low loss waveguiding and slow light modes in coupled subwavelength silicon Mie resonators.

Subwavelength light-guiding optical devices have gained great attention in the photonics community because they provide unique opportunities for miniaturization and functionality of the optical interconnect technology. On the other hand, high-refractive-index dielectric nanoparticles working at their fundamental Mie resonances have recently opened new venues to enhance and control light-matter interactions at the nanoscale while being free from Ohmic losses. Combining the best of both worlds, here we experimentally demonstrate low-loss slow light waveguiding in a chain of coupled silicon Mie resonators at telecommunication wavelengths. This resonant coupling forms waveguide modes with propagation losses comparable to, or even lower than those in a stripe waveguide of the same cross section. Moreover, the nanoparticle waveguide also exhibits slow light behaviour, with group velocities down to 0.03 of the speed of light. These unique properties of coupled silicon Mie resonator waveguides, together with hybrid coupler designs reducing the coupling loss from a bus waveguide, as also shown in this work, may open a path towards their potential applications in integrated photonics for light control in optical and quantum communications or biosensing, to mention some.

Collective Mie Resonances for Directional On-Chip Nanolasers.

A highly efficient nanocavity formed by optically coupled nanostructures is achieved by optimization of the collective Mie resonances in a one-dimensional array of semiconductor nanoparticles. Analysis of quasi-normal multipole modes enables us to reveal the close relation between the collective Mie resonances and Van Hove singularities. On the basis of these concepts, we experimentally demonstrate a directional GaAs nanolaser at cryogenic temperatures with well-defined, in-plane emission, which, moreover, can be controlled by selective excitation. The lasing threshold is shown to be significantly reduced by optimizing the interparticle gap such that the optimal near-field confinement is achieved at a resonant wavelength corresponding to the highest gain of GaAs. We show that the lasing performance of this nanolaser is orders of magnitude better than a nanowire-based laser of the same dimensions. The present work provides design guidelines for high performance in-plane emission nanolasers, which may find applications in future photonic integrated circuits.

Room-Temperature Lasing in Colloidal Nanoplatelets via Mie-Resonant Bound States in the Continuum.

Solid-state room-temperature lasing with tunability in a wide range of wavelengths is desirable for many applications. To achieve this, besides an efficient gain material with a tunable emission wavelength, a high quality-factor optical cavity is essential. Here, we combine a film of colloidal CdSe/CdZnS core-shell nanoplatelets with square arrays of nanocylinders made of titanium dioxide to achieve optically pumped lasing at visible wavelengths and room temperature. The all-dielectric arrays support bound states in the continuum (BICs), which result from lattice-mediated Mie resonances and boast infinite quality factors in theory. In particular, we demonstrate lasing from a BIC that originates from out-of-plane magnetic dipoles oscillating in phase. By adjusting the diameter of the cylinders, we tune the lasing wavelength across the gain bandwidth of the nanoplatelets. The spectral tunability of both the cavity resonance and nanoplatelet gain, together with efficient light confinement in BICs, promises low-threshold lasing with wide selectivity in wavelengths.

Lasing Action in Single Subwavelength Particles Supporting Supercavity Modes.

On-chip light sources are critical for the realization of fully integrated photonic circuitry. So far, semiconductor miniaturized lasers have been mainly limited to sizes on the order of a few microns. Further reduction of sizes is challenging fundamentally due to the associated radiative losses. While using plasmonic metals helps to reduce radiative losses and sizes, they also introduce Ohmic losses hindering real improvements. In this work, we show that, making use of quasibound states in the continuum, or supercavity modes, we circumvent these fundamental issues and realize one of the smallest purely semiconductor nanolasers thus far. Here, the nanolaser structure is based on a single semiconductor nanocylinder that intentionally takes advantage of the destructive interference between two supported optical modes, namely Fabry-Perot and Mie modes, to obtain a significant enhancement in the quality factor of the cavity. We experimentally demonstrate the concept and obtain optically pumped lasing action using GaAs at cryogenic temperatures. The optimal nanocylinder size is as small as 500 nm in diameter and only 330 nm in height with a lasing wavelength around 825 nm, corresponding to a size-to-wavelength ratio as low as 0.6.

Efficient visible light modulation based on electrically tunable all dielectric metasurfaces embedded in thin-layer nematic liquid crystals.

All-dielectric metasurfaces have attracted attention for highly efficient visible light manipulation. So far, however, they are mostly passive devices, while those allowing dynamic control remain a challenge. A highly efficient tuning mechanism is immersing the metasurface in a birefringent liquid crystal (LC), whose refractive index can be electrically controlled. Here, an all-dielectric tunable metasurface is demonstrated based on this concept, operating at visible frequencies and based on TiO2 nanodisks embedded in a thin LC layer. Small driving voltages from 3~5 V are sufficient to tune the metasurface resonances, with an associated transmission modulation of more than 65%. The metasurface optical responses, including the observed electric and magnetic dipole resonance shifts as well as the interfacial anchoring effect of the LC induced by the presence of the nanostructures, are systematically discussed. The dynamic tuning observed in the transmission spectra can pave the way to dynamically tunable metasurface devices for efficient visible light modulation applications.

Phase-only transmissive spatial light modulator based on tunable dielectric metasurface.

Rapidly developing augmented reality, solid-state light detection and ranging (LIDAR), and holographic display technologies require spatial light modulators (SLMs) with high resolution and viewing angle to satisfy increasing customer demands. Performance of currently available SLMs is limited by their large pixel sizes on the order of several micrometers. Here, we propose a concept of tunable dielectric metasurfaces modulated by liquid crystal, which can provide abrupt phase change, thus enabling pixel-size miniaturization. We present a metasurface-based transmissive SLM, configured to generate active beam steering with >35% efficiency and a large beam deflection angle of 11°. The high resolution and steering angle obtained provide opportunities to develop the next generation of LIDAR and display technologies.