All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos.

Metasurfaces, optics made from subwavelength-scale nanostructures, have been limited to millimeter-sizes by the scaling challenge of producing vast numbers of precisely engineered elements over a large area. In this study, we demonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising 18.7 billion nanostructures that operates in the visible spectrum with a fast f-number (f/1.5, NA = 0.32) using deep-ultraviolet (DUV) projection lithography. Our work overcomes the exposure area constraints of lithography tools and demonstrates that large metasurfaces are commercially feasible. Additionally, we investigate the impact of various fabrication errors on the imaging quality of the metalens, several of which are specific to such large area metasurfaces. We demonstrate direct astronomical imaging of the Sun, the Moon, and emission nebulae at visible wavelengths and validate the robustness of such metasurfaces under extreme environmental thermal swings for space applications.

Point singularity array with metasurfaces.

Phase singularities are loci of darkness surrounded by monochromatic light in a scalar field, with applications in optical trapping, super-resolution imaging, and structured light-matter interactions. Although 1D singular structures, like optical vortices, are common due to their robust topological properties, uncommon 0D (point) and 2D (sheet) singularities can be generated by wavefront-shaping devices like metasurfaces. With the design flexibility of metasurfaces, we deterministically position ten identical point singularities using a single illumination source. The phasefront is inverse-designed using phase-gradient maximization with an automatically-differentiable propagator and produces tight longitudinal intensity confinement. The array is experimentally realized with a TiO2 metasurface. One possible application is blue-detuned neutral atom trap arrays, for which this field would enforce 3D confinement and a potential depth around 0.22 mK per watt of incident laser power. We show that metasurface-enabled point singularity engineering may significantly simplify and miniaturize the optical architecture for super-resolution microscopes and dark traps.

Evaluation and characterization of imaging polarimetry through metasurface polarization gratings.

Metasurfaces are a new class of diffractive optical elements with subwavelength elements whose behavior can be lithographically tailored. By leveraging form birefringence, metasurfaces can serve as multifunctional freespace polarization optics. Metasurface gratings are novel, to the best of our knowledge, polarimetric components that integrate multiple polarization analyzers into a single optical element enabling the realization of compact imaging polarimeters. The promise of metasurfaces as a new polarization building block is contingent on the calibration of metagrating-based optical systems. A prototype metasurface full Stokes imaging polarimeter is compared to a benchtop reference instrument using an established linear Stokes test for 670, 532, and 460 nm gratings. We propose a complementary full Stokes accuracy test and demonstrate it using the 532 nm grating. This work presents methods and practical considerations involved in producing accurate polarization data from a metasurface-based Stokes imaging polarimeter and informs their use in polarimetric systems more generally.

Dispersion-engineered metasurfaces reaching broadband 90% relative diffraction efficiency.

Dispersion results from the variation of index of refraction as well as electric field confinement in sub-wavelength structures. It usually results in efficiency decrease in metasurface components leading to troublesome scattering into unwanted directions. In this letter, by dispersion engineering, we report a set of eight nanostructures whose dispersion properties are nearly identical to each other while being capable of providing 0 to 2π full-phase coverage. Our nanostructure set enables broadband and polarization-insensitive metasurface components reaching 90% relative diffraction efficiency (normalized to the power of transmitted light) from 450 nm to 700 nm in wavelength. Relative diffraction efficiency is important at a system level - in addition to diffraction efficiency (normalized to the power of incident light) - as it considers only the transmitted optical power that can affect the signal to noise ratio. We first illustrate our design principle by a chromatic dispersion-engineered metasurface grating, then show that other metasurface components such as chromatic metalenses can also be implemented by the same set of nanostructures with significantly improved relative diffraction efficiency.

All-Optical Tunability of Metalenses Permeated with Liquid Crystals.

Metasurfaces have been extensively engineered to produce a wide range of optical phenomena, allowing exceptional control over the propagation of light. However, they are generally designed as single-purpose devices without a modifiable postfabrication optical response, which can be a limitation to real-world applications. In this work, we report a nanostructured planar-fused silica metalens permeated with a nematic liquid crystal (NLC) and gold nanoparticle solution. The physical properties of embedded NLCs can be manipulated with the application of external stimuli, enabling reconfigurable optical metasurfaces. We report the all-optical, dynamic control of the metalens optical response resulting from thermoplasmonic-induced changes of the NLC solution associated with the nematic-isotropic phase transition. A continuous and reversible tuning of the metalens focal length is experimentally demonstrated, with a variation of 80 µm (0.16% of the 5 cm nominal focal length) along the optical axis. This is achieved without direct mechanical or electrical manipulation of the device. The reconfigurable properties are compared with corroborating numerical simulations of the focal length shift and exhibit close correspondence.

Nonseparable Polarization Wavefront Transformation.

In this Letter, we investigate a new class of polarization wave front transformations which exhibit nonconventional far field interference behavior. We show that these can be realized by double-layer metasurfaces, which overcome the intrinsic limitations of single-layer metasurfaces. Holograms that encode four or more distinct patterns in nonorthogonal polarization states are theoretically demonstrated. This Letter clarifies and expands the possibilities enabled by a broad range of technologies which can spatially modulate light's polarization state and, for metasurfaces specifically, rigorously establishes when double-layer metasurfaces are-and are not-required.

Inverse design enables large-scale high-performance meta-optics reshaping virtual reality.

Meta-optics has achieved major breakthroughs in the past decade; however, conventional forward design faces challenges as functionality complexity and device size scale up. Inverse design aims at optimizing meta-optics design but has been currently limited by expensive brute-force numerical solvers to small devices, which are also difficult to realize experimentally. Here, we present a general inverse-design framework for aperiodic large-scale (20k × 20k λ2) complex meta-optics in three dimensions, which alleviates computational cost for both simulation and optimization via a fast approximate solver and an adjoint method, respectively. Our framework naturally accounts for fabrication constraints via a surrogate model. In experiments, we demonstrate aberration-corrected metalenses working in the visible with high numerical aperture, poly-chromatic focusing, and large diameter up to the centimeter scale. Such large-scale meta-optics opens a new paradigm for applications, and we demonstrate its potential for future virtual-reality platforms by using a meta-eyepiece and a laser back-illuminated micro-Liquid Crystal Display.

Generalized polarization transformations with metasurfaces.

Metasurfaces are arrays of sub-wavelength spaced nanostructures, which can be designed to control the many degrees-of-freedom of light on an unprecedented scale. In this work, we design meta-gratings where the diffraction orders can perform general, arbitrarily specified, polarization transformation without any reliance on conventional polarization components, such as waveplates and polarizers. We use matrix Fourier optics to design our devices and introduce a novel approach for their optimization. We implement the designs using form-birefringent metasurfaces and quantify their behavior - retardance and diattenuation. Our work is of importance in applications, such as polarization abberation correction in imaging systems, and in experiments requiring novel and compact polarization detection and control.

Engineering phase and polarization singularity sheets.

Optical phase singularities are zeros of a scalar light field. The most systematically studied class of singular fields is vortices: beams with helical wavefronts and a linear (1D) singularity along the optical axis. Beyond these common and stable 1D topologies, we show that a broader family of zero-dimensional (point) and two-dimensional (sheet) singularities can be engineered. We realize sheet singularities by maximizing the field phase gradient at the desired positions. These sheets, owning to their precise alignment requirements, would otherwise only be observed in rare scenarios with high symmetry. Furthermore, by applying an analogous procedure to the full vectorial electric field, we can engineer paraxial transverse polarization singularity sheets. As validation, we experimentally realize phase and polarization singularity sheets with heart-shaped cross-sections using metasurfaces. Singularity engineering of the dark enables new degrees of freedom for light-matter interaction and can inspire similar field topologies beyond optics, from electron beams to acoustics.

Meta-optics achieves RGB-achromatic focusing for virtual reality.

Virtual and augmented realities are rapidly developing technologies, but their large-scale penetration will require lightweight optical components with small aberrations. We demonstrate millimeter-scale diameter, high-NA, submicron-thin, metasurface-based lenses that achieve diffraction-limited achromatic focusing of the primary colors by exploiting constructive interference of light from multiple zones and dispersion engineering. To illustrate the potential of this approach, we demonstrate a virtual reality system based on a home-built fiber scanning near-eye display.

Optical properties of metasurfaces infiltrated with liquid crystals.

Optical metasurfaces allow the ability to precisely manipulate the wavefront of light, creating many interesting and exotic optical phenomena. However, they generally lack dynamic control over their optical properties and are limited to passive optical elements. In this work, we report the nontrivial infiltration of nanostructured metalenses with three respective nematic liquid crystals of different refractive index and birefringence. The optical properties of the metalens are evaluated after liquid-crystal infiltration to quantify its effect on the intended optical design. We observe a significant modification of the metalens focus after infiltration for each liquid crystal. These optical changes result from modification of local refractive index surrounding the metalens structure after infiltration. We report qualitative agreement of the optical experiments with finite-difference time-domain solver (FDTD) simulation results. By harnessing the tunability inherent in the orientation dependent refractive index of the infiltrated liquid crystal, the metalens system considered here has the potential to enable dynamic reconfigurability in metasurfaces.

All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography.

Metalenses, planar lenses realized by placing subwavelength nanostructures that locally impart lenslike phase shifts to the incident light, are promising as a replacement for refractive optics for their ultrathin, lightweight, and tailorable characteristics, especially for applications where payload is of significant importance. However, the requirement of fabricating up to billions of subwavelength structures for centimeter-scale metalenses can constrain size-scalability and mass-production for large lenses. In this Letter, we demonstrate a centimeter-scale, all-glass metalens capable of focusing and imaging at visible wavelength, using deep-ultraviolet (DUV) projection stepper lithography. Here, we show size-scalability and potential for mass-production by fabricating 45 metalenses of 1 cm diameter on a 4 in. fused-silica wafer. The lenses show diffraction-limited focusing behavior for any homogeneously polarized incidence at visible wavelengths. The metalens' performance is quantified by the Strehl ratio and the modulation transfer function (MTF), which are then compared with commercial refractive spherical and aspherical singlet lenses of similar size and focal length. We further explore the imaging capabilities of our metalens using a color-pixel sCMOS camera and scanning-imaging techniques, demonstrating potential applications for virtual reality (VR) devices or biological imaging techniques.

High-Speed Colloidal Quantum Dot Photodiodes via Accelerating Charge Separation at Metal-Oxide Interface.

With ever-growing technological demands in the imaging sensor industry for autonomous driving and augmented reality, developing sensors that can satisfy not only image resolution but also the response speed becomes more challenging. Herein, the focus is on developing a high-speed photosensor capable of obtaining high-resolution, high-speed imaging with colloidal quantum dots (QDs) as the photosensitive material. In detail, high-speed QD photodiodes are demonstrated with rising and falling times of τr = 28.8 ± 8.34 ns and τf = 40 ± 9.81 ns, respectively, realized by fast separation of electron-hole pairs due to the action of internal electric field at the QD interface, mainly by the interaction between metal oxide and the QD's ligands. Such energy transfer relations are analyzed and interpreted with time-resolved photoluminescence measurements, providing physical understanding of the device and working principles.

Nanocrystalline Titanium Metal-Organic Frameworks for Highly Efficient and Flexible Perovskite Solar Cells.

Flexible perovskite solar cells (PSCs) have attracted considerable attention due to their excellent performance, low-cost, and great potential as an energy supplier for soft electronic devices. In particular, the design of charge transporting layers (CTLs) is crucial to the development of highly efficient and flexible PSCs. Herein, nanocrystalline Ti-based metal-organic framework (nTi-MOF) particles are synthesized to have ca. 6 nm in diameter. These are then well-dispersed in alcohol solvents in order to generate electron transporting layers (ETLs) in PSCs under ambient temperatures using a spin-coating process. The electronic structure of nTi-MOF ETL is found to be suitable for charge injection and transfer from the perovskite to the electrodes. The combination of a [6,6]-phenyl-C61-butyric acid (PCBM) into the nTi-MOF ETL provides for efficient electron transfer and also suppresses direct contact between the perovskite and the electrode. This results in impressive power conversion efficiencies (PCEs) of 18.94% and 17.43% for rigid and flexible devices, respectively. Moreover, outstanding mechanical stability is retained after 700 bending cycles at a bending radius ( r) of 10 mm.

Solution-processed indium oxide electron transporting layers for high-performance and photo-stable perovskite and organic solar cells.

Interface engineering is considered the key to improving the device performance and stability of solar cells. In particular, TiO2 nanostructures, when used as electron transporting layers (ETLs) in metal halide perovskite solar cells (PSCs), led to excellent power conversion efficiencies (PCEs) of over 20%. They effectively transferred charge carriers from the perovskite and suppressed charge recombination at the interfaces. However, the photocatalytic effect of TiO2 on the perovskite can significantly degrade the device performance under ultraviolet illumination. Therefore, other classes of n-type metal oxides with a wide band gap should be developed to improve their photo-stability. Herein, we demonstrate the development of In2O3 thin films by a solution process and their application as ETLs in PSCs and organic solar cells (OSCs). Pin hole-free In2O3 ETLs obtained by the thermal decomposition of an In precursor thin film exhibit high conductivity (2.49 × 10-4 S cm-1) and low surface roughness (7.33 nm). This leads to impressive PCEs of 14.63% and 3.03% for the PSC and the inverted OSC, respectively. Furthermore, the In2O3-PSC shows better photo-stability than the TiO2-PSC by virtue of the wider band gap of In2O3, which leads to a PCE retention of 74% and 46%, relative to the initial PCE values of the PSC and the inverted OSC, respectively.

Quantum cascade lasers with Y2O3 insulation layer operating at 8.1 µm.

SiO2 is a commonly used insulation layer for QCLs but has high absorption peak around 8 to 10 µm. Instead of SiO2, we used Y2O3 as an insulation layer for DC-QCL and successfully demonstrated lasing operation at the wavelength around 8.1 µm. We also showed 2D numerical analysis on the absorption coefficient of our DC-QCL structure with various parameters such as insulating materials, waveguide width, and mesa angle.

Emissive CdTe/ZnO/GO quasi-core-shell-shell hybrid quantum dots for white light emitting diodes.

Colloidal quantum dots (QDs) have been extensively studied for optoelectronic and biological applications due to their unique physical and optical properties. In particular, among the optoelectronics applications, the white light emitting diode (WLED) has great potential in flat panel displays and solid-state lighting. Herein, we demonstrate a novel, facile, and efficient technique for the synthesis of CdTe/ZnO/GO quasi-core-shell-shell hybrid quantum dots containing the CdTe core with multi shells of ZnO and graphene oxide (GO) and fabrication of WQDLEDs. The CdTe/ZnO/GO quasi-core-shell-shell QDs have a unique strong photoluminescence (PL) peak at 624 nm related to the CdTe core and new weak peaks at 382, 404, 422, and 440 nm due to conjugation with ZnO and GO. Also, in the electroluminescence (EL), multiple emission peaks are observed, which can be correlated to the recombination process inside the CdTe core and also recombination of electrons in the lowest unoccupied molecular orbital (LUMO) and LUMO+2 of GO and holes in the valence band (VB) of ZnO. The QDLEDs show clear white color emission with a maximum luminance value of about 480 cd m-2 with Commission Internationale de l'Eclairage (CIE) color coordinates of (0.35, 0.28).

Alternative Patterning Process for Realization of Large-Area, Full-Color, Active Quantum Dot Display.

Although various colloidal quantum dot (QD) coating and patterning techniques have been developed to meet the demands in optoelectronic applications over the past years, each of the previously demonstrated methods has one or more limitations and trade-offs in forming multicolor, high-resolution, or large-area patterns of QDs. In this study, we present an alternative QD patterning technique using conventional photolithography combined with charge-assisted layer-by-layer (LbL) assembly to solve the trade-offs of the traditional patterning processes. From our demonstrations, we show repeatable QD patterning process that allows multicolor QD patterns in both large-area and microscale. Also, we show that the QD patterns are robust against additional photolithography processes and that the thickness of the QD patterns can be controlled at each position. To validate that this process can be applied to actual device applications as an active material, we have fabricated inverted, differently colored, active QD light-emitting device (QD-LED) on a pixelated substrate, which achieved maximum electroluminescence intensity of 23 770 cd/m2, and discussed the results. From our findings, we believe that our process provides a solution to achieving both high-resolution and large-scale QD pattern applicable to not only display, but also to practical photonic device research and development.