Structure and electrical properties of nanoparticulate tungsten oxide prepared by microwave plasma synthesis.

Nanoparticulate WO(3) films were prepared using microwave plasma synthesis and studied with respect to the electrical conductivity in dependence of ambient conditions. The WO(3) films with a monoclinic structure were made from cluster-assembled nanoparticles (diameter 3 nm) by means of dispersion and spin-coating. Above 100 °C a thermally activated decrease of the electrical resistance due to oxygen vacancy donors is found. A reversible increase of the electrical resistance R due to oxygen uptake is observed. The decrease of R in response to reducing H(2)S in the ppm range is studied in dependence of temperature and pre-annealing conditions.