Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors.

Tuning ion energies in plasma-enhanced atomic layer deposition (PEALD) processes enables fine control over the material properties of functional coatings. The growth, structural, mechanical, and optical properties of HfO2 thin films are presented in detail toward photonic applications. The influence of the film thickness and bias value on the properties of HfO2 thin films deposited at 100 °C using tetrakis(dimethylamino)hafnium (TDMAH) and oxygen plasma using substrate biasing is systematically analyzed. The HfO2 films deposited without a substrate bias show an amorphous microstructure with a low density, low refractive index, high incorporation of residual hydroxyl (OH) content, and high residual tensile stress. The material properties of HfO2 films significantly improved at a low bias voltage due to the interaction with oxygen ions accelerated to the film. Such HfO2 films have a higher density, higher refractive index, and lower residual OH incorporation than films without bias. The mechanical stress becomes compressive depending on the bias values. Further increasing the ion energies by applying a larger substrate bias results in a decrease of the film density, refractive index, and a higher residual OH incorporation as well as crystalline inclusions. The comparable material properties of the HfO2 films have been reported using tris(dimethylamino)cyclopentadienyl hafnium (TDMACpH) in a different apparatus, indicating that this approach can be transferred to various systems and is highly versatile. Finally, the substrate biasing technique has been introduced to deposit stress-compensated, crack- and delamination-free high-reflective (HR) mirrors at 355 and 532 nm wavelengths using HfO2 and SiO2 as high and low refractive index materials, respectively. Such mirrors could not be obtained without the substrate biasing during the deposition because of the high tensile stress of HfO2, leading to cracks in thick multilayer systems. An HR mirror for 532 nm wavelength shows a high reflectance of 99.93%, a residual transmittance of ∼530 ppm, and a low absorption of ∼11 ppm, as well as low scattering losses of ∼4 ppm, high laser-induced damage threshold, low mechanical stress, and high environmental stability.

Creating Airy beams employing a transmissive spatial light modulator.

We present a detailed study of two novel methods for shaping the light optical wavefront by employing a transmissive spatial light modulator (SLM). Conventionally, optical Airy beams are created by employing SLMs in the so-called all-phase mode. In the first method, a numerically simulated lens phase distribution is loaded directly onto the SLM, together with the cubic phase distribution. An Airy beam is generated at the focal plane of the numerical lens. We provide for the first time, to the best of our knowledge, quantitative properties of the formed Airy beam. We derive the formula for deflection of the intensity maximum of the so-formed Airy beam, which is different from the quadratic deflection typical of Airy beams. We cross-validate the derived formula by both simulations and experiment. The second method is based on the fact that a system consisting of a transmissive SLM sandwiched between two polarizers can create a transmission function with negative values. This observation alone has the potential for various other wavefront modulations where the transmission function requires negative values. As an example for this method, we demonstrate that a wavefront can be modulated by passing the SLM system with transmission function with negative values by loading an Airy function distribution directly onto the SLM. Since the Airy function is a real-valued function but also with negative values, an Airy beam can be generated by direct transfer of the Airy function distribution onto such an SLM system. In this way, an Airy beam is generated immediately behind the SLM. As both new methods do not employ a physical lens, the two setups are more compact than conventional setups for creating Airy beams. We compare the performance of the two novel methods and the properties of the created Airy beams.