High fidelity laser beam shaping using liquid crystal on silicon spatial light modulators as diffractive neural networks.

Spatial light modulators (SLMs) based on liquid crystal on silicon (LCoS) are powerful tools for laser beam shaping as they can be used to dynamically create almost arbitrary intensity distributions. However, laser beam shaping with LCoS-SLMs often suffers from beam shaping artifacts in part caused by unconsidered properties of the LCoS devices: astigmatism that stems from the non-normal incidence of the laser beam on the SLM and the effect commonly referred to as the '0-th diffraction order' that is caused by both the crosstalk between neighboring pixels and the direct reflection at the cover glass of the SLM. We here present a method to consider and compensate for these inherent properties of LCoS devices by treating the SLM as a diffractive neural network.

Investigation of asymmetry reduction for surface structuring and destructuring by laser remelting.

Lasers are widely used for structuring metallic surfaces by ablating material. An alternative approach for laser structuring is surface structuring by laser remelting (WaveShape), which is based onthe continuous remelting of a thin surface layer using laser radiation while simultaneously modulating the laser power. The structures are generated by redistribution of the molten material. The structure height and the structure wavelength of periodic structures created using WaveShape can be precisely adjusted by the adaption of various process parameters. However, the structures produced are mostly asymmetrical. An asymmetric structure refers to a structure that is not symmetrical and is inclined in or against the scanning direction. In the context of this work, the asymmetry of the structures was significantly reduced through two different process adaptations. As a first adaption, a compensation term is added to the laser power modulation, which is calculated from the difference profile between a target profile and a structured profile. With this adaption, the shape deviation of an asymmetrical structure could be decreased by 66 %. Asymmetry can be reduced efficiently, although the difference profile required must be determined from a preliminary process step. As a second adaption, a modulation of the scanning speed is investigated with which shape deviation can be decreased by 40 %. Asymmetry is not as effectively prevented as when using the first adaption, but the adaption can be performed without the difference profile. Another aim was to investigate the destructuring, i.e. the removal and therefore smoothing, of asymmetric structures. Using the inverse laser power modulation for destructuring, the structure height of a symmetrical structure can be reduced by 91 % while the structure height of an asymmetric structure can be reduced by 68 %. To increase the efficiency of destructuring of an asymmetrical structure, iterative destructuring was investigated. With two iterations of destructuring, the structure height was reduced by 90 %. As a second approach for more efficient destructuring of asymmetric structures an adaption of the laser power modulation via a compensation term was investigated. The structure height could be reduced by 86 %. In summary, results show that asymmetry can be prevented when structuring with WaveShape and that asymmetric structures can be destructured efficiently.

Advanced beam shaping for laser materials processing based on diffractive neural networks.

We propose a method based on neural network training algorithms for the design of diffractive neural networks - with the aim to perform advanced laser beam shaping in the NIR/VIS spectrum for laser materials processing. The method enables the efficient design of systems including multiple cascaded diffractive optical elements (DOEs) and allows the simultaneous optimization for complex (intensity and phase) target field distributions in multiple target planes. The multi-target boundary condition in the optimization method offers great potential for advanced laser beam shaping.

Rotation Grids for Improved Electrical Properties of Inkjet-Printed Strain Gauges.

We report an image data driven approach for inkjet printing (IJP) to improve the electrical properties of printed metallic strain gauges (SGs). The examined SGs contain narrow conducting paths of multiple orientations and therefore suffer from two challenges: 1. The printing direction of inkjet printed conducting paths has an impact on film formation and electrical properties. 2. A loss-free rotation algorithm for IJP image data is lacking. New ways of IJP image data processing are required to compensate for quality-reducing effects. Novel grid types in terms of loss-free rotation algorithms are introduced. For this purpose, a new grid (e.g., 45° tilted) with a different grid constant is placed over a given pixel grid in such a way that all cell centers of the given pixel grid can be transferred to the rotated grid. Via straightening the tilt, the image data is rotated without interpolation and information loss. By applying these methods to measurement gratings of a full bridge with two perpendicular grating orientations, the influence on the manufacturing quality is investigated. It turns out that the electrical detuning of full bridges can be reduced by one order of magnitude compared to state-of-the-art printing by using so-called diagonal rotation grids.

Design of an efficient illuminator for partially coherent sources in the extreme ultraviolet.

In this paper, the design of an efficient illuminator for extreme ultraviolet (EUV) applications such as photolithography, metrology, and microscopy is investigated. Illuminators are arrangements of optical components that allow us to tailor optical parameters to a targeted application. For the EUV spectral range, illuminators are commonly realized by an arrangement of several multilayer mirrors. Within this publication, design methods are developed to tailor optical parameters such as the intensity distribution, the spatial coherence, and the spectral bandwidth by using only one multilayer mirror. For the demonstration of the methods, an illuminator is designed for a compact in-lab EUV interference lithography system that is suited for industrial EUV resist qualification and large-area nanopatterning. The designed illuminator increases the wafer-throughput and improves the imaging quality.

Automated lens design for optical systems consisting of stock lenses.

The design of lens systems requires advanced knowledge and the mastery of highly specialized software tools. Furthermore, for the realization of the designed lens systems often custom-made lenses are needed, which are expensive and have lead times of several weeks compared to stock lenses with several days. To shorten realization time, a new approach for the automated design of lens systems consisting of stock lenses is developed. In this work, a multi-step process is described which identifies the most robust stock lens combination fulfilling prior defined requirements. The approach is realized with a computer program that can be used by a non-expert to find the most suited selection of stock lenses for a three-lens system for a set of requirements.

Rigorous approach for unifying wave optics and state of the art rendering techniques.

With the capabilities of diffractive optics there is a rising demand for determining the light interaction of diffractive elements with arbitrary illumination and scenery. Since the structured surfaces' scale lies within the visible wavelengths and below, the light's interaction cannot be simulated with state of the art geometric optic rendering approaches. This paper presents a new model for the inclusion of wave-optical effects into Monte Carlo path rendering concepts. The derived method allows the coupling of a rigorous full-field approach with the concept of backward ray propagation through complex scenes. Therefore, the rendering of arbitrarily structured periodic optical components is now possible for complex sceneries for design, verification and testing purposes. The method's performance is demonstrated by comparing rendering results of complex sceneries including CDs with corresponding photographs.

Freeform optics design for extended sources in paraxial approximation exploiting the expectation maximization algorithm.

Freeform optics generating specific irradiance distributions have been used in various applications for some time now. While most freeform optics design algorithms assume point sources or perfectly collimated light, the search for algorithms for non-idealized light sources with finite spatial as well as angular extent is still ongoing. In this work, such an approach is presented where the resulting irradiance distribution of a freeform optical surface is calculated as a superposition of pinhole images generated by points on the optical surface. To compute the required arrangement of the pinhole images for a prescribed irradiance pattern, the expectation maximization algorithm from statistics is applied. The result is then combined with a ray-targeting approach for finding the shape of the corresponding freeform optical surface. At its current state, the approach is applicable to Gaussian input irradiances, single-sided freeform optics and for the paraxial case. An example freeform optical surface for laser material processing is shown and discussed demonstrating the performance and the limitations of the presented approach.

Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup.

The authors present a study on the dimensional characterization of nanoscale line gratings by spectroscopic reflectometry in the extreme ultraviolet spectral range (5 nm to 20 nm wavelength). The investigated grating parameters include the line height, the line width, the sidewall angle and corner radii. The study demonstrates that the utilization of shorter wavelengths in state-of-the-art optical scatterometry provides a high sensitivity with respect to the geometrical dimensions of nanoscale gratings. Measurable contrasts are demonstrated for dimensional variations in the sub-percent regime, down to one tenth of a nanometer and one tenth of a degree in absolute terms. In an experimental validation of the method, it is shown that reflectance curves can be obtained in a stand-alone setup using the broadband emission of a discharge produced plasma as the source of EUV radiation, demonstrating the potential scalability of the method for industrial uses. Simulated reflectance curves are fit to the experimental curves by variation of the grating parameters using rigorous electromagnetic modeling. The obtained grating parameters are cross-checked by a scanning electron microscopy analysis.

Design of structured YAG:Ce scintillators with enhanced outcoupling for image detection in the extreme ultraviolet.

In this Letter, the authors present a design study on YAG:Ce scintillator plates with a microstructured and coated surface. The goal of the study is to improve the outcoupling efficiency and to optimize the directionality of the scintillation light with respect to indirect image detection in the extreme ultraviolet spectral range (5-50 nm wavelength). In a geometric optical simulation, a gain in outcoupling efficiency by over a factor of 4 is shown while the directionality of the scintillation light is improved with respect to state-of-the-art plane scintillator plates.

Glass-ceramic coating material for the CO2 laser based sintering of thin films as caries and erosion protection.

OBJECTIVES: The established method of fissure-sealing using polymeric coating materials exhibits limitations on the long-term. Here, we present a novel technique with the potential to protect susceptible teeth against caries and erosion. We hypothesized that a tailored glass-ceramic material could be sprayed onto enamel-like substrates to create superior adhesion properties after sintering by a CO2 laser beam. METHODS: A powdered dental glass-ceramic material from the system SiO2-Na2O-K2O-CaO-Al2O3-MgO was adjusted with individual properties suitable for a spray coating process. The material was characterized using X-ray fluorescence analysis (XRF), heating microscopy, dilatometry, scanning electron microscopy (SEM), grain size analysis, biaxial flexural strength measurements, fourier transform infrared spectroscopy (FTIR), and gas pycnometry. Three different groups of samples (each n=10) where prepared: Group A, powder pressed glass-ceramic coating material; Group B, sintered hydroxyapatite specimens; and Group C, enamel specimens (prepared from bovine teeth). Group B and C where spray coated with glass-ceramic powder. All specimens were heat treated using a CO2 laser beam process. Cross-sections of the laser-sintered specimens were analyzed using laser scanning microscopy (LSM), energy dispersive X-ray analysis (EDX), and SEM. RESULTS: The developed glass-ceramic material (grain size d50=13.1mm, coefficient of thermal expansion (CTE)=13.310-6/K) could be spray coated on all tested substrates (mean thickness=160µm). FTIR analysis confirmed an absorption of the laser energy up to 95%. The powdered glass-ceramic material was successfully densely sintered in all sample groups. The coating interface investigation by SEM and EDX proved atomic diffusion and adhesion of the glass-ceramic material to hydroxyapatite and to dental enamel. SIGNIFICANCE: A glass-ceramic material with suitable absorption properties was successfully sprayed and laser-sintered in thin films on hydroxyapatite as well as on bovine enamel. The presented novel technique of tooth coating with a dental glass-ceramic using a CO2-laser holds a great potential as a possible method to protect susceptible teeth against caries and erosion.

Laser Carbonization of PAN-Nanofiber Mats with Enhanced Surface Area and Porosity.

Here we present a novel laser process to generate carbon nanofiber nonwovens from polyacrylonitrile. We produce carbon nanofabrics via electrospinning followed by infrared laser-induced carbonization, facilitating high surface area and well-controlled hierarchical porosity. The process allows precise control of the carbonization conditions and provides high nanoscale porosity. In comparison with classical thermal carbonization, the laser process produces much higher surface areas and smaller pores. Furthermore, we investigate the carbonization performance and the morphology of polyacrylonitrile nanofibers compounded with graphene nanoplatelet fillers.

Optical set-up for dynamic superposition of three laser beams for structuring and polishing applications.

Structuring by remelting is an innovative approach for structuring metallic surfaces with laser radiation, where no material is removed but reallocated while molten. Based on this remelting principle an innovative structuring technique is investigated, where laser beams are superposed. A melt pool is generated by a cw laser beam with constant feed rate. A pulsed laser is superposed onto the cw laser and evaporates a small amount of molten material and, therefore, generates vapour pressure, which shapes the melt pool surface. The solidification follows this newly shaped surface. For this process a new optical system was designed and built up, which allows the combination of cw and pulsed laser beams.

Limitations of the ray mapping approach in freeform optics design.

It was previously demonstrated by Bäuerle et al. [Opt. Express20, 14477 (2012)] that the computation of ray paths through the optical system (ray mapping) can be used to design multisurface freeform optical elements creating a prescribed irradiance pattern for a zero-étendue source. The procedure outlined there uses the heuristic step of reducing the ray mapping's curl to improve adherence to surface integrability criteria. This Letter formally derives a quantitative estimate for the limitations of this approach in the collimated case and shows the key factors influencing the quality of the final optics.

High resolution irradiance tailoring using multiple freeform surfaces.

More and more lighting applications require the design of dedicated optics to achieve a given radiant intensity or irradiance distribution. Freeform optics has the advantage of providing such a functionality with a compact design. It was previously demonstrated in [Bäuerle et al., Opt. Exp. 20, 14477-14485 (2012)] that the up-front computation of the light path through the optical system (ray mapping) provides a satisfactory approximation to the problem, and allows the design of multiple freeform surfaces in transmission or in reflection. This article presents one natural extension of this work by introducing an efficient optimization procedure based on the physics of the system. The procedure allows the design of multiple freeform surfaces and can render high resolution irradiance patterns, as demonstrated by several examples, in particular by a lens made of two freeform surfaces projecting a high resolution logo (530 × 160 pixels).

Algorithm for irradiance tailoring using multiple freeform optical surfaces.

The design of freeform lenses and reflectors allows to achieve non-radially symmetric irradiance distributions whilst keeping the optical system compact. In the case of a point-like source, such as an LED, it is often desired to capture a wide angle of source light in order to increase optical efficiency. This generally results in strongly curved optics, requiring both lens surfaces to contribute to the total ray refraction, and thereby minimising Fresnel losses. In this article, we report on a new design algorithm for multiple freeform optical surfaces based on the theory of optimal mass transport that adresses these requirements and give an example of its application to a problem in general lighting.