Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures.

Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagations in the component layers are characterized by local scattering matrices (s-matrices), which are efficiently computed and integrated into the global s-matrix of the structures to describe the optical responses. The performance of our work is demonstrated through three-dimensional (3D) multilayer nanohole structures in the practical case of industrial Muller matrix measurements of optical diffusers. Another case of plasmonic biosensing is also used to validate our work in simulating full optical responses. The results show significant numerical improvements for the examples, demonstrating the gain in using the RCWA method to address the metrological studies of multilayer nanodevices.

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films.

Mueller ellipsometry in the mid-infrared (IR) spectral range can be used to obtain information about chemical composition through the vibrational spectra of samples. In the case of very thin films (<100 nm), the ellipsometric spectral features due to vibrational absorption are in general quite weak, and sometimes they are hidden by the noise in the measured data. In this work, we present one method based on the use of optical spacers as a tool to enhance the sensitivity of IR Mueller ellipsometry. An optical spacer is a thin film made of a known material which is between the substrate and the layer of interest. We show that, when the thickness of the two layers fulfills a given condition, the spectral features due to vibrational absorptions are enhanced. We explain the enhancement effect in terms of the Airy formula. The theoretical discussion is illustrated with two examples. We analyzed polystyrene thin films deposited on silicon wafers. Some of the wafers were covered by a thin film of thermal silicon dioxide (SiO2), which was used as a spacer. The results show the suitability of the proposed technique to overcome the lack of sensitivity in ellipsometric measurements when it comes to working with either very thin films or materials with low absorption.

Non-conductive ferromagnets based on core double-shell nanoparticles for radio-electric applications.

Two fabrication schemes of magnetic metal-polymer nanocomposites films are described. The nanocomposites are made of graphene-coated cobalt nanoparticles embedded in a polystyrene matrix. Scheme 1 uses non-covalent chemistry while scheme 2 involves covalent bonding with radicals. Preservation of the net-moment of cobalt and electrical insulation are achieved by means of a core double-shell structure of cobalt-graphene-polystyrene. The graphene shell has two functions: it is a protective layer against metal core oxidation and it serves as the functionalization surface for polymer grafting as well. The polystyrene shell is used as an insulating layer between nanoparticles and improves nanoparticles dispersion inside the polystyrene matrix. The theoretical maximum volume filling ratio estimated at ~30 % is almost reached. The nanocomposites are shown to undergo percolation behavior but retain low conductivity (<1 S/m) at the highest filling ratio reached ~25 % leading to extremely low losses (10(-3)) at high frequency. Such low conductivity values are combined with large magnetization, as high as 0.9 T. Ability for radiofrequency applications is discussed in regards to the obtained magnetization.