Phase-based reconstruction optimization method for digital holographic measurement of microstructures.

Digital holography has transformative potential in measuring stacked-chip microstructures due to its noninvasive, single-shot, full-field characteristics. However, uncertainties in reconstruction distance inevitably lead to resolving blur and reconstruction distortion. Herein, we propose a phase-based reconstruction optimization method that consists of a phase-evaluation function and a structured surface-characterization model. Our proposed method involves setting a reconstruction distance range, obtaining phase information using sliced numerical reconstruction, and optimizing the reconstruction distance by finding the extreme value of the function, which identifies the focal plane of the reconstructed image. The structure of the surface topography is then characterized using the characterization model. We perform simulations of the recording, reconstruction, and characterization to verify the effectiveness of the proposed method. To further demonstrate the approach, a simple holographic recording system is constructed to measure a standard resolution target, and the measurement results are compared with a commercial instrument. The simulation and experiment demonstrate, respectively, 31.16% and 34.41% improvement in step-height characterization accuracy.

Integrated opto-mechanical cantilever sensor with a rib waveguide.

An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 µm-1 which is increased by about 21%, compared with the conventional structure.

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor.

This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 µm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.

Explanation of the distorted spectrum in a spectral hole burning RF spectrum analyzer using Bloch equations.

A readout using a frequency-chirped laser is investigated in a spectrum analyzer with spectral-hole-burning (SHB). An analysis based on the Bloch equations is presented for the spectral distortion due to a fast readout, and a recovery algorithm is developed for the distortion. The experiment of a SHB spectrum analyzer is executed to demonstrate the optical spectral distortion due to fast readout. The experimental spectral distortion is recovered by the recovery algorithm developed from the Bloch equations.