Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield.

In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrades registration accuracy, severely limiting device performance and process yield. We introduce a methodology to solve this widespread but poorly understood problem. A new foundation of traceable localization enables rapid characterization of lithographic standards and comprehensive calibration of cryogenic microscopes, revealing and correcting latent systematic effects. Of particular concern, we discover that scale factor deviation and complex optical distortion couple to dominate registration errors. These novel results parameterize a process model for integrating quantum dots and bullseye resonators, predicting higher yield by orders of magnitude, depending on the Purcell factor threshold as a quantum performance metric. Our foundational methodology is a key enabler of the lab-to-fab transition of quantum information technologies and has broader implications to cryogenic and correlative microscopy.

Surface-Normal Free-Space Beam Projection via Slow-Light Standing-Wave Resonance Photonic Gratings.

On-chip grating couplers directly connect photonic circuits to free-space light. The commonly used photonic gratings have been specialized for small areas, specific intensity profiles, and nonvertical beam projection. This falls short of the precise and flexible wavefront control over large beam areas needed to empower emerging integrated miniaturized optical systems that leverage volumetric light-matter interactions, including trapping, cooling, and interrogation of atoms, bio- and chemi- sensing, and complex free-space interconnect. The large coupler size challenges general inverse design techniques, and solutions obtained by them are often difficult to physically understand and generalize. Here, by posing the problem to a carefully constrained computational inverse-design algorithm capable of large area structures, we discover a qualitatively new class of grating couplers. The numerically found solutions can be understood as coupling an incident photonic slab mode to a spatially extended slow-light (near-zero refractive index) region, backed by a reflector. The structure forms a spectrally broad standing wave resonance at the target wavelength, radiating vertically into free space. A reflectionless adiabatic transition critically couples the incident photonic mode to the resonance, and the numerically optimized lower cladding provides 70% overall theoretical conversion efficiency. We have experimentally validated an efficient surface normal collimated emission of ≈90 µm full width at half-maximum Gaussian at the thermally tunable operating wavelength of ≈780 nm. The variable-mesh-deformation inverse design approach scales to extra large photonic devices, while directly implementing the fabrication constraints. The deliberate choice of smooth parametrization resulted in a novel type of solution, which is both efficient and physically comprehensible.

Exceptional points in lossy media lead to deep polynomial wave penetration with spatially uniform power loss.

Waves entering a spatially uniform lossy medium typically undergo exponential intensity decay, arising from either the energy loss of the Beer-Lambert-Bouguer transmission law or the evanescent penetration during reflection. Recently, exceptional point singularities in non-Hermitian systems have been linked to unconventional wave propagation. Here, we theoretically propose and experimentally demonstrate exponential decay free wave propagation in a purely lossy medium. We observe up to 400-wave deep polynomial wave propagation accompanied by a uniformly distributed energy loss across a nanostructured photonic slab waveguide with exceptional points. We use coupled-mode theory and fully vectorial electromagnetic simulations to predict deep wave penetration manifesting spatially constant radiation losses through the entire structured waveguide region regardless of its length. The uncovered exponential decay free wave phenomenon is universal and holds true across all domains supporting physical waves, finding immediate applications for generating large, uniform and surface-normal free-space plane waves directly from dispersion-engineered photonic chip surfaces.

Towards integrated photonic interposers for processing octave-spanning microresonator frequency combs.

Microcombs-optical frequency combs generated in microresonators-have advanced tremendously in the past decade, and are advantageous for applications in frequency metrology, navigation, spectroscopy, telecommunications, and microwave photonics. Crucially, microcombs promise fully integrated miniaturized optical systems with unprecedented reductions in cost, size, weight, and power. However, the use of bulk free-space and fiber-optic components to process microcombs has restricted form factors to the table-top. Taking microcomb-based optical frequency synthesis around 1550 nm as our target application, here, we address this challenge by proposing an integrated photonics interposer architecture to replace discrete components by collecting, routing, and interfacing octave-wide microcomb-based optical signals between photonic chiplets and heterogeneously integrated devices. Experimentally, we confirm the requisite performance of the individual passive elements of the proposed interposer-octave-wide dichroics, multimode interferometers, and tunable ring filters, and implement the octave-spanning spectral filtering of a microcomb, central to the interposer, using silicon nitride photonics. Moreover, we show that the thick silicon nitride needed for bright dissipative Kerr soliton generation can be integrated with the comparatively thin silicon nitride interposer layer through octave-bandwidth adiabatic evanescent coupling, indicating a path towards future system-level consolidation. Finally, we numerically confirm the feasibility of operating the proposed interposer synthesizer as a fully assembled system. Our interposer architecture addresses the immediate need for on-chip microcomb processing to successfully miniaturize microcomb systems and can be readily adapted to other metrology-grade applications based on optical atomic clocks and high-precision navigation and spectroscopy.

Efficient photo-induced second harmonic generation in silicon nitride photonics.

Silicon photonics lacks a second-order nonlinear optical (χ(2)) response in general because the typical constituent materials are centro-symmetric and lack inversion symmetry, which prohibits χ(2) nonlinear processes such as second harmonic generation (SHG). Here, we realize record-high SHG efficiency in silicon photonics by combining a photo-induced effective χ(2) nonlinearity with resonant enhancement and perfect-phase matching. We show a conversion efficiency of (2,500 ± 100) %/W, which is 2 to 4 orders of magnitude larger than previous field-induced SHG works. In particular, our devices realize milliwatt-level SHG output powers with up to (22 ± 1) % power conversion efficiency. This demonstration is a major breakthrough in realizing efficient χ(2) processes in silicon photonics, and paves the way for further integration of self-referenced frequency combs and optical frequency references.

A universal frequency engineering tool for microcavity nonlinear optics: multiple selective mode splitting of whispering-gallery resonances.

Whispering-gallery microcavities have been used to realize a variety of efficient parametric nonlinear optical processes through the enhanced light-matter interaction brought about by supporting multiple high quality factor and small modal volume resonances. Critical to such studies is the ability to control the relative frequencies of the cavity modes, so that frequency matching is achieved to satisfy energy conservation. Typically this is done by tailoring the resonator cross-section. Doing so modifies the frequencies of all of the cavity modes, that is, the global dispersion profile, which may be undesired, for example, in introducing competing nonlinear processes. Here, we demonstrate a frequency engineering tool, termed multiple selective mode splitting (MSMS), that is independent of the global dispersion and instead allows targeted and independent control of the frequencies of multiple cavity modes. In particular, we show controllable frequency shifts up to 0.8 nm, independent control of the splitting of up to five cavity modes with optical quality factors ≳ 105, and strongly suppressed frequency shifts for untargeted modes. The MSMS technique can be broadly applied to a wide variety of nonlinear optical processes across different material platforms, and can be used to both selectively enhance processes of interest and suppress competing unwanted processes.

Chip-integrated visible-telecom photon pair sources for quantum communication.

Photon pair sources are fundamental building blocks for quantum entanglement and quantum communication. Recent studies in silicon photonics have documented promising characteristics for photon pair sources within the telecommunications band, including sub-milliwatt optical pump power, high spectral brightness, and high photon purity. However, most quantum systems suitable for local operations, such as storage and computation, support optical transitions in the visible or short near-infrared bands. In comparison to telecommunications wavelengths, the significantly higher optical attenuation in silica at such wavelengths limits the length scale over which optical-fiber-based quantum communication between such local nodes can take place. One approach to connect such systems over fiber is through a photon pair source that can bridge the visible and telecom bands, but an appropriate source, which should produce narrow-band photon pairs with a high signal-to-noise ratio, has not yet been developed. Here, we demonstrate an on-chip visible-telecom photon pair source for the first time, using high quality factor silicon nitride microresonators to generate bright photon pairs with an unprecedented coincidence-to-accidental ratio (CAR) up to (3.8 ± 0.2) × 103. We further demonstrate dispersion engineering of the microresonators to enable the connection of different species of trapped atoms/ions, defect centers, and quantum dots to the telecommunications bands for future quantum communication systems.

Milliwatt-threshold visible-telecom optical parametric oscillation using silicon nanophotonics.

The on-chip creation of coherent light at visible wavelengths is crucial to field-level deployment of spectroscopy and metrology systems. Although on-chip lasers have been implemented in specific cases, a general solution that is not restricted by limitations of specific gain media has not been reported. Here, we propose creating visible light from an infrared pump by widely-separated optical parametric oscillation (OPO) using silicon nanophotonics. The OPO creates signal and idler light in the 700 nm and 1300 nm bands, respectively, with a 900 nm pump. It operates at a threshold power of (0.9 ± 0.1) mW, over 50× smaller than other widely-separated microcavity OPO works, which have only been reported in the infrared. This low threshold enables direct pumping without need of an intermediate optical amplifier. We further show how the device design can be modified to generate 780 nm and 1500 nm light with a similar power efficiency. Our nanophotonic OPO shows distinct advantages in power efficiency, operation stability, and device scalability, and is a major advance towards flexible on-chip generation of coherent visible light.

Metasurface-Integrated Photonic Platform for Versatile Free-Space Beam Projection with Polarization Control.

Densely integrated photonic circuits enable scalable, complex processing of optical signals, including modulation, multiplexing, wavelength conversion, and detection. Directly interfacing such integrated circuits to free-space optical modes will enable novel optical functions, such as chip-scale sensing, interchip free-space interconnect and cooling, trapping, and interrogation of atoms. However, doing this within the limits of planar batch fabrication requires new approaches for bridging the large mode scale mismatch. Here, by integrating a dielectric metasurface with an extreme photonic mode converter, we create a versatile nanophotonic platform for efficient coupling to arbitrary-defined free-space radiation of 780 nm wavelength with well-controlled spatially-dependent polarization, phase, and intensity. Without leaving the chip, the high index photonic mode is converted first to a ≈ 200 µm wide, precisely collimated, linearly-polarized Gaussian beam, which is then modified by a planar, integrated, low-loss metasurface. We demonstrate high numerical aperture, diffraction limited focusing to an ≈ 473 nm spot at an ≈ 75 µm working distance, and combine it with simultaneous conversion from linear to elliptical polarization. All device components are lithographically defined and can be batch fabricated, facilitating future chip-scale low-cost hybrid photonic systems for bio-sensing, nonlinear signal processing and atomic quantum sensing, frequency references and memory.

Kerr Microresonator Soliton Frequency Combs at Cryogenic Temperatures.

We investigate the accessibility and projected low-noise performance of single soliton Kerr frequency combs in silicon nitride microresonators enabled by operating at cryogenic temperatures as low as 7 K. The resulting two orders of magnitude reduction in the thermo-refractive coefficient relative to room-temperature enables direct access to single bright Kerr soliton states through adiabatic frequency tuning of the pump laser while remaining in thermal equilibrium. Our experimental results, supported by theoretical modeling, show that single solitons are easily accessible at temperatures below 60 K for the microresonator device under study. We further demonstrate that the cryogenic temperature primarily impacts the thermo-refractive coefficient. Other parameters critical to the generation of solitons, such as quality factor, dispersion, and effective nonlinearity, are unaltered. Finally, we discuss the potential improvement in thermo-refractive noise resulting from cryogenic operation. The results of this study open up new directions in advancing chip-scale frequency comb optical clocks and metrology at cryogenic temperatures.

Efficient telecom-to-visible spectral translation through ultra-low power nonlinear nanophotonics.

The ability to spectrally translate lightwave signals in a compact, low-power platform is at the heart of the promise of nonlinear nanophotonic technologies. For example, a device to link the telecommunications band with visible and short near-infrared wavelengths can enable a connection between high-performance chip-integrated lasers based on scalable nanofabrication technology with atomic systems used for time and frequency metrology. While second-order nonlinear (χ(2)) systems are the natural approach for bridging such large spectral gaps, here we show that third-order nonlinear (χ(3)) systems, despite their typically much weaker nonlinear response, can realize spectral translation with unprecedented performance. By combining resonant enhancement with nanophotonic mode engineering in a silicon nitride microring resonator, we demonstrate efficient spectral translation of a continuous-wave signal from the telecom band (≈ 1550 nm) to the visible band (≈ 650 nm) through cavity-enhanced four-wave mixing. We achieve such translation over a wide spectral range >250 THz with a translation efficiency of (30.1 ± 2.8) % and using an ultra-low pump power of (329 ± 13) µW. The translation efficiency projects to (274 ± 28) % at 1 mW and is more than an order of magnitude larger than what has been achieved in current nanophotonic devices.

Photonic waveguide to free-space Gaussian beam extreme mode converter.

Integration of photonic chips with millimeter-scale atomic, micromechanical, chemical, and biological systems can advance science and enable new miniaturized hybrid devices and technology. Optical interaction via small evanescent volumes restricts performance in applications such as gas spectroscopy, and a general ability to photonically access optical fields in large free-space volumes is desired. However, conventional inverse tapers and grating couplers do not directly scale to create wide, high-quality collimated beams for low-loss diffraction-free propagation over many millimeters in free space, necessitating additional bulky collimating optics and expensive alignment. Here, we develop an extreme mode converter, which is a compact planar photonic structure that efficiently couples a 300 nm × 250 nm silicon nitride high-index single-mode waveguide to a well-collimated near surface-normal Gaussian beam with an ≈160 µm waist, which corresponds to an increase in the modal area by a factor of >105. The beam quality is thoroughly characterized, and propagation over 4 mm in free space and coupling back into a single-mode photonic waveguide with low loss via a separate identical mode converter is demonstrated. To achieve low phase error over a beam area that is >100× larger than that of a typical grating coupler, our approach separates the two-dimensional mode expansion into two sequential separately optimized stages, which create a fully expanded and well-collimated Gaussian slab mode before out-coupling it into free space. Developed at 780 nm for integration with chip-scale atomic vapor cell cavities, our design can be adapted for visible, telecommunication, or other wavelengths. The technique can be expanded to more arbitrary phase and intensity control of both large-diameter, free-space optical beams and wide photonic slab modes.

Stably accessing octave-spanning microresonator frequency combs in the soliton regime.

Microresonator frequency combs can be an enabling technology for optical frequency synthesis and timekeeping in low size, weight, and power architectures. Such systems require comb operation in low-noise, phase-coherent states such as solitons, with broad spectral bandwidths (e.g., octave-spanning) for self-referencing to detect the carrier-envelope offset frequency. However, accessing such states is complicated by thermo-optic dispersion. For example, in the Si3N4 platform, precisely dispersion-engineered structures can support broadband operation, but microsecond thermal time constants often require fast pump power or frequency control to stabilize the solitons. In contrast, here we consider how broadband soliton states can be accessed with simple pump laser frequency tuning, at a rate much slower than the thermal dynamics. We demonstrate octave-spanning soliton frequency combs in Si3N4 microresonators, including the generation of a multi-soliton state with a pump power near 40 mW and a single-soliton state with a pump power near 120 mW. We also develop a simplified two-step analysis to explain how these states are accessed without fast control of the pump laser, and outline the required thermal properties for such operation. Our model agrees with experimental results as well as numerical simulations based on a Lugiato-Lefever equation that incorporates thermo-optic dispersion. Moreover, it also explains an experimental observation that a member of an adjacent mode family on the red-detuned side of the pump mode can mitigate the thermal requirements for accessing soliton states.

The Nanolithography Toolbox.

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

A dual electrolyte H2/O2 planar membraneless microchannel fuel cell system with open circuit potentials in excess of 1.4 V.

A dual electrolyte H2/O2 fuel cell system employing a planar microfluidic membraneless fuel cell has been investigated and compared to single electrolyte H2/O2 systems under analogous conditions. The fuel is H2 dissolved in 0.1 M KOH (pH 13), and the oxidant is O2 dissolved in 0.1 M H2SO4 (pH 0.9), comprising a system with a calculated thermodynamic potential of 1.943 V (when 1 M H2 and O2 concentrations are assumed). This value is well above the calculated thermodynamic maximum of 1.229 V for an acid, or alkaline, single electrolyte H2/O2 fuel cell. Experimentally, open-circuit potentials in excess of 1.4 V have been achieved with the dual electrolyte system. This is a 500 mV increase in the open circuit potentials observed for single electrolyte H2/O2 systems also studied. The dual electrolyte fuel cell system shows power generation of 0.6 mW/cm2 from a single device, which is nearly 0.25 mW/cm2)greater than the values obtained for single electrolyte H2/O2 fuel cell systems studied. Microchannels of varying dimensions have been employed to study both the single and dual electrolyte H2/O2 systems. Channel thickness variation and the flow rate dependences of power generation are also addressed.