Editorial for the Special Issue on Micro/Nano-Structure Based Optoelectronics and Photonics Devices.

In the ever-evolving fields of optoelectronics and photonics, the introduction of carefully designed micro-/nanostructures enables personalized customization of the electrical and optical properties of optoelectronic and photonic devices [...].

Two-dimensional optical differentiator for broadband edge detection based on dielectric metasurface.

Image edge processing has widespread adoption in a variety of scientific and industrial scenarios. To date, implementations of image edge processing have mostly been done electronically, but there are still difficulties to achieve real-time, high-throughput, and low power consumption image edge processing. The advantages of optical analog computing include low power consumption, fast transmission speed, and high parallel processing capability, and optical analog differentiators make this process possible. However, the proposed analog differentiators can hardly meet the requirements of broadband, polarization insensitive, high contrast, and high efficiency at the same time. Moreover, they are limited to one-dimensional differentiation or work in reflection mode. To be better compatible with two-dimensional image processing or image recognition systems, two-dimensional optical differentiators that integrate the above advantages are urgently needed. In this Letter, a two-dimensional analog optical differentiator with edge detection operating in transmission mode is proposed. It can cover the visible band, is polarization uncorrelated, and has a resolution that reaches 1.7 µm. The efficiency of the metasurface is higher than 88%.

Ultraviolet-Visible-Short-Wavelength Infrared Broadband and Fast-Response Photodetectors Enabled by Individual Monocrystalline Perovskite Nanoplate.

Perovskite-based photodetectors exhibit potential applications in communication, neuromorphic chips, and biomedical imaging due to their outstanding photoelectric properties and facile manufacturability. However, few of perovskite-based photodetectors focus on ultraviolet-visible-short-wavelength infrared (UV-Vis-SWIR) broadband photodetection because of the relatively large bandgap. Moreover, such broadband photodetectors with individual nanocrystal channel featuring monolithic integration with functional electronic/optical components have hardly been explored. Herein, an individual monocrystalline MAPbBr3 nanoplate-based photodetector is demonstrated that simultaneously achieves efficient UV-Vis-SWIR detection and fast-response. Nanoplate photodetectors (NPDs) are prepared by assembling single nanoplate on adjacent gold electrodes. NPDs exhibit high external quantum efficiency (EQE) and detectivity of 1200% and 5.37 × 1012 Jones, as well as fast response with rise time of 80 µs. Notably, NPDs simultaneously achieve high EQE and fast response, exceeding most perovskite devices with multi-nanocrystal channel. Benefiting from the high specific surface area of nanoplate with surface-trap-assisted absorption, NPDs achieve high performance in the near-infrared and SWIR spectral region of 850-1450 nm. Unencapsulated devices show outstanding UV-laser-irradiation endurance and decent periodicity and repeatability after 29-day-storage in atmospheric environment. Finally, imaging applications are demonstrated. This work verifies the potential of perovskite-based broadband photodetection, and stimulates the monolithic integration of various perovskite-based devices.

Demonstration of polarization-insensitive optical filters on silicon photonics platform.

We experimentally demonstrate a polarization-insensitive optical filter (PIOF) using polarization rotator-splitters (PRSs) and microring resonators (MRRs) on the silicon-on-insulator (SOI) platform with complementary metal-oxide-semiconductor (CMOS) compatible fabrication process. The PRS consists of a tapered-rib waveguide and an asymmetrical directional coupler (ADC), which realize the polarization rotation and splitting, to ensure the connected MRRs-based optical filter operating at one desired polarization when light with different polarizations are launched into the device. The measured results show that the optical transmission spectra of the device are identical for TE and TM polarization input. The box-like filtering spectra are also achieved with a 3-dB bandwidth of ∼0.15 nm and a high extinction ratio (ER) over 30 dB.

Design of All-Dielectric Metasurface-Based Subtractive Color Filter by Artificial Neural Network.

Structural colors produced by light manipulating at subwavelength dimensions have been widely studied. In this work, a metasurface-based subtractive color filter (SCF) is demonstrated. The color display of the SCF is confirmed by finding the complementary color of colors filtered by SCF within the color wheel. In addition, two artificial neural network (ANN) models are utilized to accelerate the metasurface forward prediction, and the long short-term memory (LSTM) shows much better performance than traditional multilayer perceptron (MLP). Meanwhile, we train an inverse ANN model established with LSTM to recover the optimal geometric parameter combinations of the meta-atoms. With the variation of the geometric parameters of meta-atoms, versatile color displays of structural colors are realized. The metasurface we propose exhibits good performance of transmissive-type structural color in visible range. The work provides a method for high-efficiency geometric parameter prediction, and paves the way to nanostructure-based color design for display and anticounterfeiting applications.

Long short-term memory neural network for directly inverse design of nanofin metasurface.

In this Letter, the neural network long short-term memory (LSTM) is used to quickly and accurately predict the polarization sensitivity of a nanofin metasurface. In the forward prediction, we construct a deep neural network (DNN) with the same structure for comparison with LSTM. The test results show that LSTM has a higher accuracy and better robustness than DNN in similar cases. In the inverse design, we directly build an LSTM to reverse the design similar to the forward prediction network. By inputting the extinction ratio value in 8-12 µm, the inverse network can directly provide the unit cell geometry of the nanofin metasurface. Compared with other methods used to inverse design photonic structures using deep learning, our method is more direct because no other networks are introduced.

Hole array enhanced dual-band infrared photodetection.

Photonic structures have been attracting more attention due to their ability to capture, concentrate and propagate optical energy. In this work, we propose a photon-trapping hole-array structure integrated in a nip InAsSb-GaSb heterostructure for the enhancement of the photoresponse in both near- and mid-infrared regions. The proposed symmetrical hole array can increase the photon lifetime inside the absorption layer and reduce reflection without polarization dependence. Significant enhancements in absorption and photoelectric conversion efficiency are demonstrated in dual bands for unpolarized incidence. The enhancement factors of responsivity at room temperature under zero-bias are 1.12 and 1.33 for the near- and mid-infrared, respectively, and they are increased to 1.71 and 1.79 when temperature drops to the thermoelectric cooling temperature of 220 K. Besides, such an integrated hole array also slightly improves working frequency bandwidth and response speed. This work provides a promising way for high-efficiency polarization-independent photoelectric conversion in different electromagnetic wave ranges.

Polarization-Controlled Plasmonic Structured Illumination.

Structured light in the subwavelength scale is important for a broad range of applications ranging from lithography to imaging. Of particular importance is the ability to dynamically shift the pattern of the fields, which has led to the development of structured illumination microscopy. Further extension of structured illumination to plasmonic systems has enabled imaging beyond diffraction limit. However, structured illumination usually requires complicated optical setups entailing moving mechanical parts. Here a polarization tunable structured plasmonic field (SPF) is proposed and experimentally demonstrated. The SPF is formed by surface plasmon interference (SPI) generated by a fishbone-shaped metasurface on a thin gold film. Importantly, the SPF can be continuously shifted by merely varying the linear polarization state of an incident beam. The precise control of the fringes of structured illumination and elimination of mechanical control will have great potential in subdiffractional imaging for practical applications.

Rotated fourfold U-shape metasurface for polarization-insensitive strong enhancement of mid-infrared photodetection.

Metasurface with thin planar resonant elements offers great capability in manipulating electromagnetic waves and their interaction with semiconductors. Split-ring resonator (SRR), as the basic building block, has been extensively investigated for myriad applications owing to its multiple electric and magnetic resonant modes. In this work, we report a rotated fourfold U-shape SRR metasurface for polarization-insensitive strong enhancement of mid-infrared photodetection. The integrated photodetector consists of a rotated fourfold SRR array and an InAsSb based heterojunction photodiode. A photosensitivity enhancement factor as high as 11 has been achieved by adoption of superimposed high order magnetic and electric resonant modes in the SRR metasurface. This work provides a promising pathway for exploring high performance polarization-insensitive photodetection in different electromagnetic wave ranges.

CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers.

The implementation of polarization controlling components enables additional functionalities of short-wave infrared (SWIR) imagers. The high-performance and mass-producible polarization controller based on Si metasurface is in high demand for the next-generation SWIR imaging system. In this work, we report the first demonstration of all-Si metasurface based polarizing bandpass filters (PBFs) on 12-inch wafers. The PBF achieves a polarization extinction ratio of above 10 dB in power within the passbands. Using the complementary metal-oxide-semiconductor (CMOS) compatible 193nm ArF deep ultra-violet (DUV) immersion lithography and inductively coupled plasma (ICP) etch processing line, a device yield of 82% is achieved.

Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer.

The demonstration of a color display metasurface on a 12-inch silicon wafer with critical dimension (CD) below 100 nm by complementary metal-oxide semiconductor (CMOS) compatible technology is reported for the first time. The 193 nm ArF deep UV immersion lithography is leveraged instead of electron beam lithography (EBL) to pattern the metasurface, which greatly improves the efficiency while keeping a high resolution. The demonstrated metasurface successfully generates the resonant modes and reflects the lights at resonance wavelengths, giving its display in red, green, and blue (RGB) colors. The wafer-level uniformities of CD and reflection characteristic of the metasurface are measured and analyzed. The experimental data show that they are well controlled in the fabrication process. The work provides a promising route towards mass production of dielectric metasurfaces.

Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation.

The spin and orbital angular momentum (SAM and OAM) of light is providing a new gateway toward high capacity and robust optical communications. While the generation of light with angular momentum is well studied in linear optics, its further integration into nonlinear optical devices will open new avenues for increasing the capacity of optical communications through additional information channels at new frequencies. However, it has been challenging to manipulate the both SAM and OAM of nonlinear signals in harmonic generation processes with conventional nonlinear materials. Here, we report the generation of spin-controlled OAM of light in harmonic generations by using ultrathin photonic metasurfaces. The spin manipulation of OAM mode of harmonic waves is experimentally verified by using second harmonic generation (SHG) from gold meta-atom with 3-fold rotational symmetry. By introducing nonlinear phase singularity into the metasurface devices, we successfully generate and measure the topological charges of spin-controlled OAM mode of SHG through an on-chip metasurface interferometer. The nonlinear photonic metasurface proposed in this work not only opens new avenues for manipulating the OAM of nonlinear optical signals but also benefits the understanding of the nonlinear spin-orbit interaction of light in nanoscale devices.

Surface plasmon induced direct detection of long wavelength photons.

Millimeter and terahertz wave photodetectors have long been of great interest due to a wide range of applications, but they still face challenges in detection performance. Here, we propose a new strategy for the direct detection of millimeter and terahertz wave photons based on localized surface-plasmon-polariton (SPP)-induced non-equilibrium electrons in antenna-assisted subwavelength ohmic metal-semiconductor-metal (OMSM) structures. The subwavelength OMSM structure is used to convert the absorbed photons into localized SPPs, which then induce non-equilibrium electrons in the structure, while the antenna increases the number of photons coupled into the OMSM structure. When the structure is biased and illuminated, the unidirectional flow of the SPP-induced non-equilibrium electrons forms a photocurrent. The energy of the detected photons is determined by the structure rather than the band gap of the semiconductor. The detection scheme is confirmed by simulation and experimental results from the devices, made of gold and InSb, and a room temperature noise equivalent power (NEP) of 1.5 × 10-13 W Hz-1/2 is achieved.

Subwavelength dielectric nanorod chains for energy transfer in the visible range.

We report a new type of energy transfer device, formed by a dielectric nanorod array embedded in a silver slab. Such dielectric chain structures allow surface plasmon wave guiding with large propagation length and highly suppressed crosstalk between adjacent transmission channels. The simulation results show that our proposed design can be used to enhance the energy transfer along the waveguide-like dielectric nanorod chains via coupled plasmons, where the energy spreading is effectively suppressed, and superior imaging properties in terms of resolution and energy transfer distance can be achieved.

Multifunctional Hyperbolic Nanogroove Metasurface for Submolecular Detection.

Metasurface serves as a promising plasmonic sensing platform for engineering the enhanced light-matter interactions. Here, a hyperbolic metasurface with the nanogroove structure in the subwavelength scale is designed. This metasurface is able to modify the wavefront and wavelength of surface plasmon wave with the variation of the nanogroove width or periodicity. At the specific optical frequency, surface plasmon polaritons are tightly confined and propagated with a diffraction-free feature due to the epsilon-near-zero effect. Most importantly, the groove hyperbolic metasurface can enhance the plasmonic sensing with an ultrahigh phase sensitivity of 30 373 deg RIU-1 and Goos-Hänchen shift sensitivity of 10.134 mm RIU-1 . The detection resolution for refractive index change of glycerol solution is achieved as 10-8 RIU based on the phase measurement. The detection limit of bovine serum albumin (BSA) molecule is measured as low as 0.1 × 10-18 m (1 × 10-19 mol L-1 ), which corresponds to a submolecular detection level (0.13 BSA mm-2 ). As for low-weight biotin molecule, the detection limit is estimated below 1 × 10-15 m (1 × 10-15 mol L-1 , 1300 biotin mm-2 ). This enhanced plasmonic sensing performance is two orders of magnitude higher than those with current state-of-art plasmonic metamaterials and metasurfaces.

On-chip discrimination of orbital angular momentum of light with plasmonic nanoslits.

The orbital angular momentum (OAM) of light can be taken as an independent and orthogonal degree of freedom for multiplexing in an optical communication system, potentially improving the system capacity to hundreds of Tbits per second. The high compactness and miniaturization of devices required for optical communications impose strict requirements on discriminating OAM modes of light at a small (micro- or even nano-meter) scale for demultiplexing; these requirements represent a challenge for traditional OAM sorting strategies. Here, we propose a semi-ring plasmonic nanoslit to directly and spatially sort various OAM modes of light into ∼120 nm-spaced mode intervals on the metallic surface. Making use of the constructive interference of a helical-phase modulated surface wave excited by a vortex beam, this on-chip interval can be stably demonstrated both theoretically and experimentally with a quasi-linear dependence on the plasmonic wavelength. Furthermore, its immunity to semi-ring geometry (i.e., the radius and number of rings) is verified by simulations. As a result, OAM discriminating is guaranteed by this stable sorting function. This technique shows a viable solution to discriminate the OAM of light at the nano-scale and might lead to broad benefits across the fields of optical communications, plasmonic physics and singular optics.

Aluminum based structures for manipulating short visible wavelength in-plane surface plasmon polariton propagation.

We report aluminum based structures for manipulation of surface plasmon polariton (SPP) propagation at short wavelength range. Our simulation shows that aluminum is a good metal to excite and propagate SPPs with blue light and that the SPP wavelength can be reduced from about 465 nm to about 265 nm by monitoring the thickness of a coated Si(3)N(4) layer above the aluminum film. It is also shown that the damping becomes more significant with the increase of the thickness of the Si(3)N(4) layer. We also experimentally demonstrated the SPP wavelength tuning effect for 20nm Si(3)N(4) layer covered Al, which can be explained by the variation of effective permittivity. The proposed Metal-Insulator-Air (MIA) structures with SPP wavelength tuning ability have potential applications in 2D optics.

Actively tunable Fano resonances based on colossal magneto-resistant metamaterials.

In this Letter, a periodic structure in which each unit cell consists of one manganese oxide (La(0.7)Ca(0.3)MnO(3)) strip and two gold strips is designed. By simulating the electromagnetic responses of the structure, we confirm that Fano resonances can be actively controlled in the infrared region by modulating the intensity of the external magnetic field applied to the structure. This is due to the colossal magneto-resistance of the La(0.7)Ca(0.3)MnO(3) material. Furthermore, a transmission phase can also be effectively tuned. The phase has a shift of ΔΦ=1.05 rad at a frequency of 130 THz when the intensity of the external magnetic field varies from 5083 to 5193 kA/m. Such a tunable method has potential applications in controllable photoelectric elements.

Unidirectional surface plasmon-polariton excitation by a compact slot partially filled with dielectric.

We propose a new scheme on unidirectional surface plasmon-polariton (SPP) excitation with the following advantages: ultracompact size, working at arbitrary incidence angle and over a wide spectrum. The proposed structure utilizes a partially filled metallic slot with dielectric to realize unidirectional SPP excitation via direct field manipulation. We theoretically and numerically show that unidirectional SPP excitation with a ratio of 93% can be achieved by a structure with a 50 nm slot. The proposed structure keeps its functional capability over incident angles from -80° to 80°, and has a broadband working spectrum of more than 70 nm.

Waveguide devices with homogeneous complementary media.

We report the design of microwave waveguide devices based on complementary media. Various kinds of waveguide devices that possess nearly 100% transmission efficiency are proposed, such as waveguide bends, splitters, connectors, and shifters. Compared with previous work on waveguide devices of low reflection and minimized distortion based on transformation optics, our transform media are homogeneous metamaterials. Electromagnetic simulations by a finite-element method on detailed examples have been performed to validate the designs and these functionalities can be close to the practical.