Prediction of Pad Wear Profile and Simulation of Its Influence on Wafer Polishing.

As feature sizes decrease, an investigation of pad unevenness caused by pad conditioning and its influence on chemical mechanical polishing is necessary. We set up a kinematic model to predict the pad wear profile caused by only diamond disk conditioning and verify it. This model shows the influences of different kinematic parameters. To keep the pad surface planar during polishing or only conditioning, we can change the sweep mode and range of the conditioner arm. The kinematic model is suitable for the prediction of the pad wear profile without considering the influence of mechanical parameters. Furthermore, based on the pad wear profile obtained from a real industrial process, we set up a static model to preliminarily investigate the influence of pad unevenness on the pad-wafer contact stress. The pad-wafer contact status in this static model can be approximated as an instantaneous state in a dynamic model. The model shows that the existence of a retaining ring helps to improve the wafer edge profile, and that pad unevenness can cause stress concentration and increase the difficulty in multi-zone pressure control of the polishing head.

Association of n-3 polyunsaturated fatty acid intakes with juvenile myopia: A cross-sectional study based on the NHANES database.

Aim: Inflammation is involved in the development of myopia. n-3 polyunsaturated fatty acids (n-3 PUFAs) have vasodilating and anti-inflammatory effects, which may be involved in controlling myopia. It is of great significance to explore the relationship between n-3 PUFA intakes and juvenile myopia in order to control and alleviate myopia among teenagers through dietary intervention. Methods: Sociodemographic data, information of nutrient intakes, cotinine, PUFAs, and eye refractive status of 1,128 juveniles were extracted from the National Health and Nutrition Examination Survey (NHANES) database in this cross-sectional study. PUFAs contained total polyunsaturated fatty acid (TPFAs), alpha-linolenic acid, octadecatetraenoic acid, eicosapentaenoic acid (EPA), docosapentaenoic acid (DPA), and docosahexaenoic acid (DHA). Covariates were screened by comparison among groups of normal vision, low myopia, and high myopia. The association between n-3 PUFA intakes and the risk of juvenile myopia was evaluated using univariate and multivariate logistic regression analyses with odds ratios (ORs) and 95% confidence intervals (CIs). Results: Among the juveniles, 788 (70.68%) had normal vision, 299 (25.80%) had low myopia, and 41 (3.52%) had high myopia. There were significant differences in average EPA and DHA intakes among the three groups, and mean DPA and DHA intakes in the normal vision group were lower than those in the low myopia group (P < 0.05). After adjustment for age, gender, TPFAs, and cotinine, a high dietary intake of EPA (≥11 mg/1,000 kcal) in juveniles seemed to be associated with the risk of high myopia (OR = 0.39, 95% CI: 0.18-0.85), while no significant associations were identified between n-3 PUFA intakes and the risk of low myopia. Conclusion: A high dietary intake of EPA may be associated with a decreased risk of high myopia among juveniles. A further prospective study is needed to validate this observation.

Hierarchically Mesostructured Aluminum Current Collector for Enhancing the Performance of Supercapacitors.

Aluminum (Al) current collector is one of the most important components of supercapacitors, and its performance has vital effects on the electrochemical performance and cyclic stability of supercapacitors. In the present work, a scalable and low-cost, yet highly efficient, picosecond laser processing method of Al current collectors was developed to improve the overall performance of supercapacitors. The laser treatment resulted in hierarchical micro-nanostructures on the surface of the commercial Al foil and reduced the surface oxygen content of the foil. The electrochemical performance of the Al foil with the micro-nanosurface structures was examined in the symmetrical activated carbon-based coin supercapacitors with an organic electrolyte. The results suggest that the laser-treated Al foil (laser-Al) increased the capacitance density of supercapacitors up to 110.1 F g-1 and promoted the rate capability due to its low contact resistance with the carbonaceous electrode and high electrical conductivity derived from its larger specific surface areas and deoxidized surface. In addition, the capacitor with the laser-Al current collector exhibited high cyclic stability with 91.5% capacitance retention after 10 000 cycles, 21.3% higher than that with pristine-Al current collector due to its stronger bonding with the carbonaceous electrode that prevented any delamination during aging. Our work has provided a new strategy for improving the electrochemical performance of supercapacitors.