RESUMEN
Modern chemical production processes often emit complex mixtures of gases, including hazardous pollutants such as NO2. Although widely used, gas sensors based on metal oxide semiconductors such as WO3 respond to a wide range of interfering gases other than NO2. Consequently, developing WO3 gas sensors with high NO2 selectivity is challenging. In this study, a simple one-step hydrothermal method was used to prepare WO3 nanorods modified with black phosphorus (BP) flakes as sensitive materials for NO2 sensing, and BP-WO3-based micro-electromechanical system gas sensors were fabricated. The characterization of the as-prepared BP-WO3 composite through X-ray diffraction scanning electron microscopy and X-ray photoelectron spectroscopy confirmed the successful formation of the sandwich-like nanostructures. The result of gas-sensing tests with 2-14 ppm NO2 indicated that the sensor response was 1.25-2.21 with response-recovery times of 36 and 36 s, respectively, at 190 °C. In contrast to pure WO3, which exhibited a response of 1.07-2.2 to 0.3-5 ppm H2S at 160 °C, BP-WO3 showed almost no response to H2S. Thus, compared with pure WO3, BP-WO3 exhibited significantly improved NO2 selectivity. Overall, the BP-WO3 composite with sandwich-like nanostructures is a promising material for developing highly selective NO2 sensors for practical applications.