ABSTRACT
Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use in wearable applications. Another step forward toward minimising the impacts of the sensors can be to avoid the use of cables and connectors by exploiting wireless transmissions at ultra-high frequencies (UHFs). Thin-film bulk acoustic wave resonators (FBARs) represent the most promising choice among all of the piezoelectric microelectromechanical system (MEMS) resonators for the climbing of radio frequencies. Accordingly, the fabrication of FBARs on flexible and wearable substrates represents a strategic step toward obtaining a new generation of highly sensitive wireless sensors. In this work, we propose the design and fabrication of a flexible gravimetric sensor based on an FBAR on a polymeric substrate. The resonator presents one of the highest electromechanical coupling factors in the category of flexible AlN-based FBARs, equal to 6%. Moreover, thanks to the polymeric support layer, the presence of membranes can be avoided, which leads to a faster and cheaper fabrication process and higher robustness of the structure. The mass sensitivity of the device was evaluated, obtaining a promising value of 23.31 ppm/pg. We strongly believe that these results can pave the way to a new class of wearable MEMS sensors that exploit ultra-high-frequency (UHF) transmissions.
ABSTRACT
Advances in wearable device technology pave the way for wireless health monitoring for medical and non-medical applications. In this work, we present a wearable heart rate monitoring platform communicating in the sub-6GHz 5G ISM band. The proposed device is composed of an Aluminium Nitride (AlN) piezoelectric sensor, a patch antenna, and a custom printed circuit board (PCB) for data acquisition and transmission. The experimental results show that the presented system can acquire heart rate together with diastolic and systolic duration, which are related to heart relaxation and contraction, respectively, from the posterior tibial artery. The overall system dimension is 20 mm by 40 mm, and the total weight is 20 g, making this device suitable for daily utilization. Furthermore, the system allows the simultaneous monitoring of multiple subjects, or a single patient from multiple body locations by using only one reader. The promising results demonstrate that the proposed system is applicable to the Internet of Healthcare Things (IoHT), and particularly Integrated Clinical Environment (ICE) applications.
ABSTRACT
Bio-inspired Dielectric Resonator Antennas (DRAs) are engaging more and more attention from the scientific community due to their exceptional wideband characteristic, which is especially desirable for the implementation of 5G communications. Nonetheless, since these antennas exhibit peculiar geometries in their micro-features, high dimensional accuracy must be accomplished via the selection of the most suitable fabrication process. In this study, the challenges to the manufacturing process presented by the wideband Spiral shell Dielectric Resonator Antenna (SsDRA), based on the Gielis superformula, are addressed. Three prototypes, made of three different photopolymer resins, were manufactured by bottom-up micro-Stereolithography (SLA). This process allows to cope with SsDRA's fabrication criticalities, especially concerning the wavy features characterizing the thin spiral surface and the micro-features located in close proximity to the spiral origin. The assembly of the SsDRAs with a ground plane and feed probe was also accurately managed in order to guarantee reliable and repeatable measurements. The scattering parameter S11 trends were then measured by means of a Vector Network Analyzer, while the realized gains and 3D radiation diagrams were measured in the anechoic chamber. The experimental results show that all SsDRAs display relevant wideband behavior of 2 GHz at -10 dB in the sub-6 GHz range.