RÉSUMÉ
Surface plasmon resonance is an effect widely used for biosensing. Biosensors based on this effect operate in different configurations, including the use of diffraction gratings as couplers. Gratings are highly tunable and are easy to integrate into a fluidic system due to their planar configuration. We discuss the optimization of plasmonic grating couplers for use in a specific sensor configuration based on the optical switch. These gratings present a sinusoidal profile with a high depth/period ratio. Their interaction with a p-polarized light beam results in two significant diffracted orders (the 0th and the -1st), which enable differential measurements cancelling noise due to common fluctuations. The gratings are fabricated by combining laser interference lithography with nanoimprinting in a process that is aligned with the challenges of low-cost mass production. The effects of different grating parameters such as the period, depth and profile are theoretically and experimentally investigated.
RÉSUMÉ
A new plasmonic configuration is proposed for application in a sensor and demonstrated for the detection of variations in the bulk refractive index of solutions. The configuration consists of monitoring two diffracted orders resulting from the interaction of a TM-polarized optical beam incident on a grating coupler, operating based on an effect termed the "optical switch". The two monitored diffracted orders enable differential measurements which cancel the drift and perturbations common to both, leading to an improved detection limit, as demonstrated experimentally. The measured switch pattern associated with the grating coupler is in good agreement with theory. Bulk sensing is demonstrated under intensity interrogation via the sequential injection of solutions comprised of glycerol in water into a fluidic cell. A limit of detection of about 10-6 RIU was achieved. The optical switch configuration is easy to implement and is cost-effective, yielding a highly promising approach for the sensing and the real-time detection of biological species.
RÉSUMÉ
Zirconium oxide (ZrO2) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO2 can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO2 layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO2 sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO2 sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates.