Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area.

In this paper, a microheater that can absorb thermal stress and has a large heating area is demonstrated by optimizing the structure and process of the microheater. Four symmetrically distributed elongated support beam structures were machined around the microheater via deep silicon etching. This design efficiently mitigates the deformation of the heated region caused by thermal expansion and enhances the structural stability of the microheater. The updated microheater no longer converts the work area into a thin film; instead, it creates a stable heating platform that can uniformly heat a work area measuring 10 × 10 mm2. The microheater is verified to have high temperature uniformity and structural stability in finite element simulation. Finally, thorough investigations of electrical-thermal-structural characterization were conducted. The test findings show that the new microheater can achieve 350 °C with a power consumption of 6 W and a thermal reaction time of 22 s. A scan of its whole plane reveals that the surface of the working area of the new microheater is flat and does not distort in response to variations in temperature, offering good structural stability.

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification.

This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators. The platform incorporates a piezoelectric ceramic actuator and a flexible hinge drive and features a symmetrical two-stage lever (STSL) amplification mechanism and a parallelogram output structure. The implementation of this design has led to notable enhancements in the dynamic properties of the platform, thereby eliminating the undesired parasitic displacement of the mechanism. An analytical model describing the fully elastic deformation of the platform is established, which is further verified by finite element simulation. Finally, the static and dynamic performances of the platform are comprehensively evaluated through experiments. A closed-loop control strategy is adopted to eliminate the nonlinear hysteresis phenomenon of the piezoceramic actuator (PEA). The experimental results show that the piezoelectric micro-actuator platform has a motion range of 97.84 µm × 98.03 µm; the output coupling displacement error is less than 1%; the resolutions of the two axes are 8.1 nm and 8 nm, respectively; and the x-axis and y-axis trajectory tracking errors are both 0.6%. The piezoelectric micromotion platform has good dynamic properties, precision, and stability. The design has a wide application potential in the field of micro-positioning.