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ACS Appl Mater Interfaces ; 5(18): 8932-8, 2013 Sep 25.
Artigo em Inglês | MEDLINE | ID: mdl-23915216


We describe a technique for the fabrication of dense and patterned arrays of aligned silicon oxide nanowires for applications in surface modification, optoelectronic, and electromechanical based devices. Conventional techniques for the fabrication of silicon oxide nanowires based on the vapor-liquid-solid (VLS) chemical vapor deposition (CVD) processes involve the use of high temperatures and catalysts. We demonstrate a technique that extends the use of a plasma thermal reactive ion etching for the fabrication of aligned silicon oxide nanowires with aspect ratios extending up to 20 and lengths exceeding 1 µm. The process incorporates phase separated PS-b-P4VP block copolymer loaded with an iron salt. The iron salt preferentially segregates into the P4VP layer and during an O2 etch is not removed but forms a hexagonally packed array on the silicon oxide substrate. Further etching with CHF3/O2 gas mixture over time can generate nanodots, to nanopillars, and then nanowires of silicon oxide. The photoluminescence property of the as-fabricated nanowire arrays as well as the parasitic ferromagnetic effect from the iron oxide-tipped section of the wires resulting in coalescence under an scanning electron microscope (SEM) are demonstrated. This technique is simpler compared to existing VLS fabrication approaches and can be used for the direct fabrication of patterned arrays of nanowires when a laser interference ablation step is incorporated into the fabrication procedure.

Nanoscale ; 5(9): 3912-7, 2013 May 07.
Artigo em Inglês | MEDLINE | ID: mdl-23532435


We report on the formation of hierarchical nanostructures of Au, PtOx, FexOy and PdOx using a hybrid technique by combining laser interference ablation (LIA) and block copolymer phase separation (BCPS). Different types of hierarchical arrays can be obtained including square, triangular, linear and circular arrays by varying the loading time of the block co-polymer with metallic salts, and the laser interference technique. The primary ordering of the as-generated nanoarrays (30-100 nm) is tunable by changing either the composition of the block copolymer spun from solution or by changing other parameters that affect the phase separation kinetics of the block copolymer, while the secondary ordering of the features can be tuned from 200 nm to 2 µm, by changing the angle of convergence of the laser beams on the patterned substrate. Such a robust method can be applied to the fabrication of other metallic and ceramic materials including Ag, Co, and Ni (O) and has potential use in the large scale fabrication of hierarchical arrays of catalysts that can be used to grow germanium, silicon nanowires using the vapour-liquid-solid growth (VLS) technique. The as-generated arrays can also find use in optical as well as sensor applications for biodetection and biosensing.