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Electrical and reliability properties of PZT thin films for ULSI DRAM applications.
Carrano, J; Sudhama, C; Chikarmane, V; Lee, J; Tasch, A; Shepherd, W; Abt, N.
Affiliation
  • Carrano J; Dept. of Electr. and Comput. Eng., Texas Univ., Austin, TX.
IEEE Trans Ultrason Ferroelectr Freq Control ; 38(6): 690-703, 1991.
Article in En | MEDLINE | ID: mdl-18267636
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Collection: 01-internacional Database: MEDLINE Language: En Journal: IEEE Trans Ultrason Ferroelectr Freq Control Journal subject: MEDICINA NUCLEAR Year: 1991 Document type: Article
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Collection: 01-internacional Database: MEDLINE Language: En Journal: IEEE Trans Ultrason Ferroelectr Freq Control Journal subject: MEDICINA NUCLEAR Year: 1991 Document type: Article