A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation tests.
Nanotechnology
; 20(2): 025701, 2009 Jan 14.
Article
in En
| MEDLINE
| ID: mdl-19417282
ABSTRACT
Indentation forces, including constant rate and oscillating mode, were applied to SiO(2)/Si and diamond-like carbon (DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.
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Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Nanotechnology
Year:
2009
Document type:
Article
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