A general design strategy for block copolymer directed self-assembly patterning of integrated circuits contact holes using an alphabet approach. | Nano Lett;15(2): 805-12, 2015 Feb 11. | MEDLINE

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A general design strategy for block copolymer directed self-assembly patterning of integrated circuits contact holes using an alphabet approach.

Yi, He; Bao, Xin-Yu; Tiberio, Richard; Wong, H-S Philip.

Affiliation

Yi H; Department of Electrical Engineering, Stanford University , Stanford, California 94305, United States.

Nano Lett ; 15(2): 805-12, 2015 Feb 11.

Article in En | MEDLINE | ID: mdl-25551471

Key words

Block copolymer; alphabet approach; contact hole patterning; design strategy; directed self-assembly

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nano Lett Year: 2015 Document type: Article Affiliation country: Country of publication:

Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nano Lett Year: 2015 Document type: Article Affiliation country: Country of publication: