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Fabrication of Uniform Wrinkled Silica Nanoparticles and Their Application to Abrasives in Chemical Mechanical Planarization.
Ryu, Jaehoon; Kim, Wookhwan; Yun, Juyoung; Lee, Kisu; Lee, Jungsup; Yu, Haejun; Kim, Jae Hyun; Kim, Jae Jeong; Jang, Jyongsik.
Affiliation
  • Kim W; Foundry CMP Technology Team , Samsung Electronics , 1, Samsung-ro , Giheung-gu, Yongin-si , Gyeonggi-do 17113 , Korea.
  • Kim JH; Foundry Material Technology Group , Semiconductor Division Samsung Electronics , 1, Samsung-ro , Giheung-gu, Yongin-si , Gyeonggi-do 17113 , Korea.
ACS Appl Mater Interfaces ; 10(14): 11843-11851, 2018 Apr 11.
Article in En | MEDLINE | ID: mdl-29522314
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Appl Mater Interfaces Journal subject: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Year: 2018 Document type: Article Country of publication:
Fulltext
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Appl Mater Interfaces Journal subject: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Year: 2018 Document type: Article Country of publication: