Mechanisms influencing and prediction of tool influence function spots during hemispherical sub-aperture tool polishing on fused silica.
Appl Opt
; 60(1): 201-214, 2021 Jan 01.
Article
in En
| MEDLINE
| ID: mdl-33362091
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Type of study:
Prognostic_studies
/
Risk_factors_studies
Language:
En
Journal:
Appl Opt
Year:
2021
Document type:
Article