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C-Axis Textured, 2-3 µm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications.
Cohen, Asaf; Cohen, Hagai; Cohen, Sidney R; Khodorov, Sergey; Feldman, Yishay; Kossoy, Anna; Kaplan-Ashiri, Ifat; Frenkel, Anatoly; Wachtel, Ellen; Lubomirsky, Igor; Ehre, David.
Affiliation
  • Cohen A; Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Cohen H; Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Cohen SR; Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Khodorov S; Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Feldman Y; Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Kossoy A; Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Kaplan-Ashiri I; Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Frenkel A; Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY 11794, USA.
  • Wachtel E; Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Lubomirsky I; Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.
  • Ehre D; Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.
Sensors (Basel) ; 22(18)2022 Sep 17.
Article in En | MEDLINE | ID: mdl-36146391
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2022 Document type: Article Affiliation country: Country of publication:
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2022 Document type: Article Affiliation country: Country of publication: