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Atomic Layer Deposition of CeO2 Film with a Novel Heteroleptic Ce(III) Complex.
Zhao, Wenyong; Zhou, Hong; Li, Jiahao; Lu, Yuchen; Ding, Yuqiang.
Affiliation
  • Zhao W; International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China.
  • Zhou H; International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China.
  • Li J; International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China.
  • Lu Y; International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China.
  • Ding Y; International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China.
Molecules ; 29(13)2024 Jun 23.
Article in En | MEDLINE | ID: mdl-38998939
ABSTRACT
In this paper, four heteroleptic Ce(III) complexes, including Ce(thd)3-phen (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, phen = 1, 10-phenanthroline (1), Ce(thd)3-MEDA (MEDA = N-Methylethylenediamine (2), Ce(thd)3-MOMA (MOMA = N-(2-Methoxyethyl)methylamine (3), and Ce(thd)3-DMDE (DMDE = N,N″-dimethyl ethanol amine (4), were synthesized and characterized with 1H-NMR, elemental analysis, and X-ray single-crystal diffraction. The thermogravimetric analysis and vapor pressure results indicated that the complexing ability of a nitrogen-containing bidentate ligand with a cerium ion was stronger than that of a mixed oxygen-nitrogen-containing bidentate ligand. Complex 2 was selected as an ALD precursor to deposit a CeO2 film on a SiO2/Si (100) wafer. The self-limited deposition results demonstrated that complex 2 was a potential ALD precursor.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Molecules Journal subject: BIOLOGIA Year: 2024 Document type: Article Affiliation country: Country of publication:
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Molecules Journal subject: BIOLOGIA Year: 2024 Document type: Article Affiliation country: Country of publication: