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Status of ITEP decaborane ion source program.
Kulevoy, T V; Petrenko, S V; Kuibeda, R P; Seleznev, D N; Koshelev, V A; Kozlov, A V; Stasevich, Yu B; Sitnikov, A L; Shamailov, I M; Pershin, V I; Hershcovitch, A; Johnson, B M; Gushenets, V I; Oks, E M; Poole, H P; Masunov, E S; Polozov, S M.
Affiliation
  • Kulevoy TV; Institute for Theoretical and Experimental Physics, Moscow, Russia. kulevoy@itep.ru
Rev Sci Instrum ; 79(2 Pt 2): 02C501, 2008 Feb.
Article in En | MEDLINE | ID: mdl-18315244
ABSTRACT
The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2008 Document type: Article Affiliation country: Rusia
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2008 Document type: Article Affiliation country: Rusia