Three point method to characterize low-pressure electronegative discharges using electrostatic probe.
Rev Sci Instrum
; 80(1): 013502, 2009 Jan.
Article
in En
| MEDLINE
| ID: mdl-19191432
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2009
Document type:
Article
Country of publication:
Estados Unidos