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Arc discharge ion source for europium and other refractory metals implantation.
Turek, M; Prucnal, S; Drozdziel, A; Pyszniak, K.
Affiliation
  • Turek M; Institute of Physics, Maria Curie-Sklodowska University, p1. M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland.
Rev Sci Instrum ; 80(4): 043304, 2009 Apr.
Article in En | MEDLINE | ID: mdl-19405653
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2009 Document type: Article Affiliation country: Polonia Country of publication: Estados Unidos
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2009 Document type: Article Affiliation country: Polonia Country of publication: Estados Unidos