Subsurface damage in precision ground ULE(R) and Zerodur(R) surfaces.
Opt Express
; 15(19): 12197-205, 2007 Sep 17.
Article
in En
| MEDLINE
| ID: mdl-19547587
The total process cycle time for large ULE((R)) and Zerodur((R))optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE((R)) and Zerodur((R) )surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: 'process' and 'machine dynamics' related.
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Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Opt Express
Journal subject:
OFTALMOLOGIA
Year:
2007
Document type:
Article
Country of publication:
Estados Unidos