Efficient optical elements to generate intensity weighted spot arrays: design and fabrication.
Appl Opt
; 30(19): 2685-91, 1991 Jul 01.
Article
in En
| MEDLINE
| ID: mdl-20700263
ABSTRACT
We report on the design and fabrication of fully 2-D surface relief diffraction elements that can split a single collimated beam into many beams in an arbitrary intensity distribution. These splitters were designed by computer using simulated annealing, and made into phase gratings by electron-beam lithography followed by plasma etching into quartz glass. Both two and four phase level gratings have been fabricated, allowing a wide range of uniform and weighted spot patterns to be generated. These grating elements have a measured diffraction efficiency of over 74%, with the beam intensity ratios accurate to within 1% of their target values.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
1991
Document type:
Article