Fabrication of high quality plan-view TEM specimens using the focused ion beam.
Micron
; 66: 9-15, 2014 Nov.
Article
in En
| MEDLINE
| ID: mdl-25080271
ABSTRACT
We describe a technique using a focused ion beam instrument to fabricate high quality plan-view specimens for transmission electron microscopy studies. The technique is simple, site-specific and is capable of fabricating multiple large, >100 µm(2) electron transparent windows within epitaxially grown thin films. A film of La0.67Sr0.33MnO3 is used to demonstrate the technique and its structural and functional properties are surveyed by high resolution imaging, electron spectroscopy, atomic force microscopy and Lorentz electron microscopy. The window is demonstrated to have good thickness uniformity and a low defect density that does not impair the film's Curie temperature. The technique will enable the study of in-plane structural and functional properties of a variety of epitaxial thin film systems.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Micron
Journal subject:
DIAGNOSTICO POR IMAGEM
Year:
2014
Document type:
Article
Publication country:
ENGLAND
/
ESCOCIA
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GB
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GREAT BRITAIN
/
INGLATERRA
/
REINO UNIDO
/
SCOTLAND
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UK
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UNITED KINGDOM