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Methodology to analyse small silicon samples by glow discharge mass spectrometry using a thin wafer mask.
Modanese, C; Arnberg, L; Di Sabatino, M.
Affiliation
  • Modanese C; Norwegian University of Science and Technology (NTNU), Department of Materials Science and Engineering, 7491 Trondheim, Norway.
  • Arnberg L; Norwegian University of Science and Technology (NTNU), Department of Materials Science and Engineering, 7491 Trondheim, Norway.
  • Di Sabatino M; Norwegian University of Science and Technology (NTNU), Department of Materials Science and Engineering, 7491 Trondheim, Norway.
MethodsX ; 2: 409-14, 2015.
Article in En | MEDLINE | ID: mdl-26649274
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: MethodsX Year: 2015 Document type: Article Affiliation country: Noruega Country of publication: Países Bajos
Fulltext
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: MethodsX Year: 2015 Document type: Article Affiliation country: Noruega Country of publication: Países Bajos