Note: Near infrared interferometric silicon wafer metrology.
Rev Sci Instrum
; 87(4): 046106, 2016 04.
Article
in En
| MEDLINE
| ID: mdl-27131722
ABSTRACT
In this investigation, two near infrared (NIR) interferometric techniques for silicon wafer metrology are described and verified with experimental results. Based on the transparent characteristic of NIR light to a silicon wafer, the fiber based spectrally resolved interferometry can measure the optical thickness of the wafer and stitching low coherence scanning interferometry can reconstruct entire surfaces of the wafer.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2016
Document type:
Article
Affiliation country:
Corea del Sur