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Atomic Layer Deposition of an Indium Gallium Oxide Thin Film for Thin-Film Transistor Applications.
Sheng, Jiazhen; Park, Eun Jung; Shong, Bonggeun; Park, Jin-Seong.
Affiliation
  • Sheng J; Division of Materials Science and Engineering, Hanyang University , Seoul 04763, Korea.
  • Park EJ; Department of Chemistry, Chungnam National University , Daejeon 34134, Korea.
  • Shong B; Department of Chemistry, Chungnam National University , Daejeon 34134, Korea.
  • Park JS; Division of Materials Science and Engineering, Hanyang University , Seoul 04763, Korea.
ACS Appl Mater Interfaces ; 9(28): 23934-23940, 2017 Jul 19.
Article in En | MEDLINE | ID: mdl-28644010
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Appl Mater Interfaces Journal subject: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Year: 2017 Document type: Article Country of publication: Estados Unidos
Fulltext
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Appl Mater Interfaces Journal subject: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Year: 2017 Document type: Article Country of publication: Estados Unidos