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Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems.
Udvardi, Péter; Radó, János; Straszner, András; Ferencz, János; Hajnal, Zoltán; Soleimani, Saeedeh; Schneider, Michael; Schmid, Ulrich; Révész, Péter; Volk, János.
Affiliation
  • Udvardi P; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. udvardi.peter98@gmail.com.
  • Radó J; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. rado@mfa.kfki.hu.
  • Straszner A; Doctoral School on Material Sciences and Technologies, Óbuda University, Bécsi út 96/b, H-1034 Budapest, Hungary. rado@mfa.kfki.hu.
  • Ferencz J; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. straszner@mfa.kfki.hu.
  • Hajnal Z; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. ferencz@mfa.kfki.hu.
  • Soleimani S; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. hajnal@mfa.kfki.hu.
  • Schneider M; Institute for Technical Physics and Materials Science, MTA EK, 1121 Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary. soleimani.saeedeh@energia.mta.hu.
  • Schmid U; Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria. michael.schneider@tuwien.ac.at.
  • Révész P; Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria. ulrich.e366.schmid@tuwien.ac.at.
  • Volk J; Department of Otorhinolaryngology-Head and Neck Surgery, Clinical Center, University of Pécs, H-7601 Pécs, Hungary. revesz.peter@pte.hu.
Micromachines (Basel) ; 8(10)2017 Oct 18.
Article in En | MEDLINE | ID: mdl-30400501
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2017 Document type: Article Affiliation country: Hungria Country of publication: Suiza
Fulltext
Add to My VHL
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2017 Document type: Article Affiliation country: Hungria Country of publication: Suiza