Fabrication of Uniaxially Aligned Silica Nanogrooves with Sub-5 nm Periodicity on Centimeter-Scale Si Substrate Using Poly(dimethylsiloxane) Stamps.

Hirota, Keiya; Hara, Shintaro; Wada, Hiroaki; Shimojima, Atsushi; Kuroda, Kazuyuki

Hirota, Keiya; Hara, Shintaro; Wada, Hiroaki; Shimojima, Atsushi; Kuroda, Kazuyuki.

Affiliation

Kuroda K; Kagami Memorial Research Institute for Materials Science and Technology , Waseda University , 2-8-26 Nishiwaseda , Shinjuku-ku, Tokyo 169-0051 , Japan.

ACS Nano ; 13(3): 2795-2803, 2019 Mar 26.

Article in En | MEDLINE | ID: mdl-30626184

Key words

alignment control; directed self-assembly; liquid crystals; nanoimprint; nanopatterning

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Nano Year: 2019 Document type: Article Country of publication: Estados Unidos

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Nano Year: 2019 Document type: Article Country of publication: Estados Unidos