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Conformal 3D Nanopatterning by Block Copolymer Lithography with Vapor-Phase Deposited Neutral Adlayer.
Yang, Geon Gug; Choi, Junhwan; Cha, Seung Keun; Lee, Gil Yong; Jin, Hyeong Min; Hwang, Ho Seong; Yun, Taeyeong; Kang, Juyeon; Han, Kyu Hyo; Kim, Jang Hwan; Choi, Hee Jae; Im, Sung Gap; Kim, Sang Ouk.
Affiliation
  • Yang GG; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Choi J; Department of Chemical and Biomolecular Engineering and KI for NanoCentury , KAIST , Daejeon 34141 , Republic of Korea.
  • Cha SK; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Lee GY; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Jin HM; Korea Atomic Energy Research Institute (KAERI) , 111 Daedeok-daero 989 Beon-Gil , Yuseong-gu, Daejeon 34057 , Republic of Korea.
  • Hwang HS; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Yun T; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Kang J; Department of Chemical and Biomolecular Engineering and KI for NanoCentury , KAIST , Daejeon 34141 , Republic of Korea.
  • Han KH; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Kim JH; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Choi HJ; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
  • Im SG; Department of Chemical and Biomolecular Engineering and KI for NanoCentury , KAIST , Daejeon 34141 , Republic of Korea.
  • Kim SO; National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly, Department of Materials Science and Engineering , KAIST , Daejeon 34141 , Republic of Korea.
ACS Nano ; 13(11): 13092-13099, 2019 Nov 26.
Article in En | MEDLINE | ID: mdl-31600440
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Nano Year: 2019 Document type: Article
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Nano Year: 2019 Document type: Article