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Constrained pupil balance compensation for specific lithographic illuminator settings.
Rui, Dawei; Yang, Huaijiang.
Appl Opt ; 59(19): 5837-5844, 2020 Jul 01.
Article in En | MEDLINE | ID: mdl-32609711
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2020 Document type: Article
Fulltext
Add to My VHL
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XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2020 Document type: Article