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Maskless nanostructure photolithography by ultrahigh-order modes of a symmetrical metal-cladding waveguide.
Zhang, Meng; Dai, Hailang; Shang, Yuxi; Cao, Zhuangqi; Chen, Xianfeng.
Opt Lett ; 47(1): 62-65, 2022 Jan 01.
Article in En | MEDLINE | ID: mdl-34951883
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Opt Lett Year: 2022 Document type: Article Country of publication: Estados Unidos
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Opt Lett Year: 2022 Document type: Article Country of publication: Estados Unidos