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Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process.
Ledesma, Eyglis; Zamora, Ivan; Uranga, Arantxa; Torres, Francesc; Barniol, Núria.
Affiliation
  • Ledesma E; Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.
  • Zamora I; Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.
  • Uranga A; Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.
  • Torres F; Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.
  • Barniol N; Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.
Sensors (Basel) ; 21(24)2021 Dec 17.
Article in En | MEDLINE | ID: mdl-34960541
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Full text: 1 Collection: 01-internacional Database: MEDLINE Main subject: Micro-Electrical-Mechanical Systems Type of study: Prognostic_studies Language: En Journal: Sensors (Basel) Year: 2021 Document type: Article Affiliation country: España Country of publication: Suiza
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Full text: 1 Collection: 01-internacional Database: MEDLINE Main subject: Micro-Electrical-Mechanical Systems Type of study: Prognostic_studies Language: En Journal: Sensors (Basel) Year: 2021 Document type: Article Affiliation country: España Country of publication: Suiza