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Compact Ga2O3 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature.
Yang, Yue; Zhang, Xiao-Ying; Wang, Chen; Ren, Fang-Bin; Zhu, Run-Feng; Hsu, Chia-Hsun; Wu, Wan-Yu; Wuu, Dong-Sing; Gao, Peng; Ruan, Yu-Jiao; Lien, Shui-Yang; Zhu, Wen-Zhang.
Affiliation
  • Yang Y; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Zhang XY; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Wang C; Fujian Key Laboratory of Optoelectronic Technology and Devices, Xiamen University of Technology, Xiamen 361024, China.
  • Ren FB; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Zhu RF; Fujian Key Laboratory of Optoelectronic Technology and Devices, Xiamen University of Technology, Xiamen 361024, China.
  • Hsu CH; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Wu WY; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Wuu DS; School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Gao P; Department of Materials Science and Engineering, Da-Yeh University, Dacun, Changhua 51591, Taiwan.
  • Ruan YJ; Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Nantou 54561, Taiwan.
  • Lien SY; Fujian Provincial Key Laboratory of Nanomaterials, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fuzhou 350002, China.
  • Zhu WZ; National Measurement and Testing Center for Flat Panel Display Industry, Xiamen Institute of Measurement and Testing, Xiamen 361004, China.
Nanomaterials (Basel) ; 12(9)2022 Apr 29.
Article in En | MEDLINE | ID: mdl-35564219
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomaterials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Suiza
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomaterials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Suiza