Your browser doesn't support javascript.
loading
Dual-Step Selective Homoepitaxy of Ge with Low Defect Density and Modulated Strain Based on Optimized Ge/Si Virtual Substrate.
Xu, Buqing; Du, Yong; Wang, Guilei; Xiong, Wenjuan; Kong, Zhenzhen; Zhao, Xuewei; Miao, Yuanhao; Wang, Yijie; Lin, Hongxiao; Su, Jiale; Li, Ben; Wu, Yuanyuan; Radamson, Henry H.
Affiliation
  • Xu B; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Du Y; School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100029, China.
  • Wang G; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Xiong W; Beijing Superstring Academy of Memory Technology, Beijing 100176, China.
  • Kong Z; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Zhao X; School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100029, China.
  • Miao Y; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Wang Y; School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100029, China.
  • Lin H; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Su J; Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China.
  • Li B; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
  • Wu Y; Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China.
  • Radamson HH; Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Materials (Basel) ; 15(10)2022 May 18.
Article in En | MEDLINE | ID: mdl-35629618
Key words
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Suiza
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Suiza