Discharge characteristics of steady-state high-density plasma source based on cascade arc discharge with hollow cathode.
Rev Sci Instrum
; 93(5): 053502, 2022 May 01.
Article
in En
| MEDLINE
| ID: mdl-35649751
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2022
Document type:
Article
Affiliation country:
Japón
Country of publication:
Estados Unidos