Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection.

Torres, Francesc; Uranga, Arantxa; Barniol, Núria

Torres, Francesc; Uranga, Arantxa; Barniol, Núria.

Affiliation

Torres F; Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain.
Uranga A; Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain.
Barniol N; Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain.

Sensors (Basel) ; 23(21)2023 Nov 03.

Article in En | MEDLINE | ID: mdl-37960643

Subject(s)
Key words

CMOS; MEMS; humidity sensor; low power; monolithic integration; non-contact detection; resonators

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Full text: 1 Collection: 01-internacional Database: MEDLINE Main subject: Technology / Metals Limits: Humans Language: En Journal: Sensors (Basel) Year: 2023 Document type: Article Affiliation country: España Country of publication: Suiza

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