A novel diamine adduct of zinc bis(2-thenoyl-trifluoroacetonate) as a promising precursor for MOCVD of zinc oxide films.
Inorg Chem
; 44(26): 9684-9, 2005 Dec 26.
Article
in En
| MEDLINE
| ID: mdl-16363837
ABSTRACT
A novel diamine (N,N,N',N'-tetramethyletilendiamine) adduct of zinc bis(2-thenoyl-trifluoroacetonate) has been synthesized in a single-step reaction. Single-crystal X-ray diffraction studies of Zn(tta)(2).tmeda provide evidence of a mononuclear structure with a six-coordinated zinc ion. The thermal behavior of this adduct points to mass-transport properties suitable for its application to MOCVD processes. This novel compound has been successfully applied as a precursor for the deposition of ZnO films on (100) Si and quartz substrates. The good quality of the deposited films indicates that the adduct is a very attractive precursor for MOCVD applications.
Search on Google
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Inorg Chem
Year:
2005
Document type:
Article