Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics.
Opt Lett
; 31(21): 3095-7, 2006 Nov 01.
Article
in En
| MEDLINE
| ID: mdl-17041646
ABSTRACT
Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.
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Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Opt Lett
Year:
2006
Document type:
Article
Affiliation country:
France