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Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip.
Horng, Ji-Bin; Liao, Jay; Tsai, Yao-Jun; Huang, Yen-Chen; Hu, Chieh; Tsau, Seth; Su, Yan-Kuin; Chou, Wei-Yang.
Affiliation
  • Horng JB; Laser Application Technology Center, Industrial Technology Reasearch Institute, Number 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan.
Appl Opt ; 46(24): 6218-22, 2007 Aug 20.
Article in En | MEDLINE | ID: mdl-17712388
We present a demonstration and analysis of an industrialized design of a spatially dispersive displacement sensor, which is composed of an AlGaInP gain chip in visible range, optical assembly, and a spectrum analyzer. The sensor utilizes the spatial dispersion of focus from the optical assembly and wavelength spectrum's deviation induced by the displacement of the target. As a result, the sensor delivers a quick and simple way of measuring displacement. By adapting the magnification and resolution of the optical assembly, a displacement sensor with a middle measurement range, ~10 microm, was obtained. However, we should note that 25 nm resolution is limited by the bandwidth and temperature fluctuation of the gain chip.
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Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2007 Document type: Article Affiliation country: Taiwan Country of publication: United States
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Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2007 Document type: Article Affiliation country: Taiwan Country of publication: United States